公开(公告)号：US20200373183A1

公开(公告)日：2020-11-26

申请号：US16848645

申请日：2020-04-14

Applicant: Applied Materials, Inc.

Inventor： Alexander N. LERNER ,  Michael P. KARAZIM ,  Andrew J. CONSTANT ,  Jeffrey A. BRODINE ,  Kim Ramkumar VELLORE ,  Kevin MORAES ,  Roey SHAVIV

IPC: H01L21/68 ,  H01J37/32 ,  C23C16/04 ,  H01L21/677 ,  H01L21/673

Abstract: An alignment module for positioning a mask on a substrate comprises a mask stocker, an alignment stage, and a transfer robot. The mask stocker houses a mask cassette that stores a plurality of masks. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer one of the one or more masks from the mask stocker to the alignment stage and position the mask over the substrate. The alignment module may be part of an integrated platform having one or more transfer chambers, a factory interface having a substrate carrier chamber and one or more processing chambers. A carrier may be coupled to a substrate within the substrate carrier chamber and moved between the processing chambers to generate a semiconductor device.

公开(公告)号：US20200286760A1

公开(公告)日：2020-09-10

申请号：US16752502

申请日：2020-01-24

Applicant: Applied Materials, Inc.

Inventor： Shreyas PATIL SHANTHAVEERASWAMY ,  Ribhu GAUTAM ,  Kumaresan NAGARAJAN ,  Vijay SINGH ,  Andrew J. CONSTANT ,  Michael P. KARAZIM ,  Kim Ramkumar VELLORE

IPC: H01L21/673 ,  H01L21/67

Abstract: Embodiments of the present disclosure relate to a substrate transfer device having a contactless latch and contactless coupling providing the ability to lock and unlock the substrate transfer device at atmospheric and vacuum pressure with without particle generation at a base of the substrate transfer device, the contactless latch, and the contactless coupling. The substrate transfer device includes a lid having one or more lid grooves, a base having one or more base grooves, and a rotation member rotatably coupled to the lid. Each flange of one or more flanges of the substrate transfer device is rotatable in aligned lid grooves and base grooves, and each flange of the one or more flanges has an arm with a ferromagnetic material coupled thereto. The base is coupled to the lid when the ferromagnetic material of the arm is aligned and spaced from a magnetic material of a slot of the one or more base grooves.

公开(公告)号：US20220130700A1

公开(公告)日：2022-04-28

申请号：US17647120

申请日：2022-01-05

Applicant: Applied Materials, Inc.

Inventor： Jacob NEWMAN ,  Ulrich OLDENDORF ,  Martin AENIS ,  Andrew J. CONSTANT ,  Shay ASSAF ,  Jeffrey C. HUDGENS ,  Alexander BERGER ,  William Tyler WEAVER

IPC: H01L21/677 ,  B65G47/92 ,  H01L21/67 ,  H01L21/687

Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

公开(公告)号：US20200373134A1

公开(公告)日：2020-11-26

申请号：US16848614

申请日：2020-04-14

Applicant: Applied Materials, Inc.

Inventor： Alexander N. LERNER ,  Michael P. KARAZIM ,  Andrew J. CONSTANT ,  Jeffrey A. BRODINE ,  Kim Ramkumar VELLORE ,  Kevin MORAES ,  Roey SHAVIV

IPC: H01J37/32 ,  C23C16/04 ,  H01L21/68 ,  H01L21/677 ,  H01L21/673

Abstract: An alignment module for housing and cleaning masks. The alignment module comprises a mask stocker, a cleaning chamber, an alignment chamber, an alignment stage a transfer robot. The mask stocker is configured to house a mask cassette configured to store a plurality of masks. The cleaning chamber is configured to clean the plurality of masks by providing one or more cleaning gases into a chamber after a mask is inserted into the cleaning chamber. The alignment stage is configured to support a carrier and a substrate. The transfer robot is configured to transfer a mask from one or more of the alignment stage and the mask stocker to the cleaning chamber.