公开(公告)号：US20240352618A1

公开(公告)日：2024-10-24

申请号：US18418531

申请日：2024-01-22

Applicant: Applied Materials, Inc.

Inventor： Vishwas Kumar PANDEY ,  Hemantha Kumar RAJU ,  Ala MORADIAN ,  Anilkumar BODEPUDI

IPC: C30B25/10 ,  B08B7/00

CPC classification number: C30B25/10 ,  B08B7/0071

Abstract: A reflector for use in a semiconductor process chamber is provided including: a body; and a bottom plate connected to a lower portion of the body, the bottom plate having a bottom surface, a top surface, and one or more side surfaces connecting the bottom surface with the top surface. A cross section of the bottom plate that extends to opposing locations on the one or more side surfaces includes a center, the cross section is divided into two or more sectors that extend from the center of the cross section, and the cross section includes a cooling channel comprising an inlet and one or more outlets.