公开(公告)号：US11798833B2

公开(公告)日：2023-10-24

申请号：US16801622

申请日：2020-02-26

Applicant: APPLIED MATERIALS, INC.

Inventor： Paul Wirth ,  Behzad Taheri

IPC: H01L21/687 ,  F15B9/03 ,  F15B11/076 ,  F15B9/14

CPC classification number: H01L21/68742 ,  F15B9/03 ,  F15B9/14 ,  F15B11/076

Abstract: Disclosed herein are embodiments of a lift apparatus and systems containing a support and at least one lift apparatus for moving a substrate between the support and a transfer plane, using a servo-control system. Further disclosed herein are methods for servo control of a lift apparatus and lifting a substrate off of a support or lowering the substrate onto the support.

公开(公告)号：US20210265194A1

公开(公告)日：2021-08-26

申请号：US16801622

申请日：2020-02-26

Applicant: APPLIED MATERIALS, INC.

Inventor： Paul Wirth ,  Behzad Taheri

IPC: H01L21/687 ,  F15B9/03

Abstract: Disclosed herein are embodiments of a lift apparatus and systems containing a support and at least one lift apparatus for moving a substrate between the support and a transfer plane, using a servo-control system. Further disclosed herein are methods for servo control of a lift apparatus and lifting a substrate off of a support or lowering the substrate onto the support.

公开(公告)号：US20240047263A1

公开(公告)日：2024-02-08

申请号：US18492488

申请日：2023-10-23

Applicant: Applied Materials, Inc.

Inventor： Paul Wirth ,  Behzad Taheri

IPC: H01L21/687 ,  F15B9/03

CPC classification number: H01L21/68742 ,  F15B9/03 ,  F15B11/076

Abstract: A lift apparatus includes a lift assembly and a servo-control system. The lift assembly includes at least one pneumatic actuator including a movable member to provide a load to transfer a substrate between a support and a transfer plane. The lift assembly further includes at least one proportional pneumatic valve to control fluid flow between the actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each to measure pressure in a respective supply line to the actuator, and at least one position sensor to measure a position of the movable member. The servo-control system includes a controller to determine an output force based on a commanded force and an estimated force, generate a control signal based on the output force, and apply the control signal to the proportional valve to move the movable member.

公开(公告)号：US20230028135A1

公开(公告)日：2023-01-26

申请号：US17954227

申请日：2022-09-27

Applicant: Applied Materials, Inc.

Inventor： Paul Wirth ,  Behzad Taheri

IPC: H01L21/687 ,  F15B9/03

Abstract: Disclosed herein are embodiments of a servo-control system comprising at least one pneumatic actuator comprising a movable member, at least one proportional pneumatic valve configured to control fluid flow between the at least one pneumatic actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each configured to independently measure pressure in a respective supply line to the at least one pneumatic actuator, at least one position sensor configured to measure a position of the moveable member, and a controller. The controller is configured to determine a control signal based at least in part on pressure measurements of the plurality of pressure sensors and a position measurement of the at least one position sensor, and apply the control signal to at least one proportional pneumatic valve to move the movable member to a target position.

公开(公告)号：US12278134B2

公开(公告)日：2025-04-15

申请号：US18492488

申请日：2023-10-23

Applicant: Applied Materials, Inc.

Inventor： Paul Wirth ,  Behzad Taheri

IPC: H01L21/687 ,  F15B9/03 ,  F15B9/14 ,  F15B11/076

Abstract: A lift apparatus includes a lift assembly and a servo-control system. The lift assembly includes at least one pneumatic actuator including a movable member to provide a load to transfer a substrate between a support and a transfer plane. The lift assembly further includes at least one proportional pneumatic valve to control fluid flow between the actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each to measure pressure in a respective supply line to the actuator, and at least one position sensor to measure a position of the movable member. The servo-control system includes a controller to determine an output force based on a commanded force and an estimated force, generate a control signal based on the output force, and apply the control signal to the proportional valve to move the movable member.

公开(公告)号：US11830760B2

公开(公告)日：2023-11-28

申请号：US17954227

申请日：2022-09-27

Applicant: Applied Materials, Inc.

Inventor： Paul Wirth ,  Behzad Taheri

IPC: H01L21/687 ,  F15B9/03 ,  F15B11/076 ,  F15B9/14

CPC classification number: H01L21/68742 ,  F15B9/03 ,  F15B9/14 ,  F15B11/076

Abstract: Disclosed herein are embodiments of a servo-control system comprising at least one pneumatic actuator comprising a movable member, at least one proportional pneumatic valve configured to control fluid flow between the at least one pneumatic actuator and a pressurized fluid supply or a vent, a plurality of pressure sensors each configured to independently measure pressure in a respective supply line to the at least one pneumatic actuator, at least one position sensor configured to measure a position of the moveable member, and a controller. The controller is configured to determine a control signal based at least in part on pressure measurements of the plurality of pressure sensors and a position measurement of the at least one position sensor, and apply the control signal to at least one proportional pneumatic valve to move the movable member to a target position.