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    POST PREVENTATIVE MAINTENANCE CHAMBER CONDITION MONITORING AND SIMULATION
    3.
    发明公开
    POST PREVENTATIVE MAINTENANCE CHAMBER CONDITION MONITORING AND SIMULATION 审中-公开

    公开(公告)号：US20230185255A1

    公开(公告)日：2023-06-15

    申请号：US17551180

    申请日：2021-12-14

    Applicant: Applied Materials, Inc.

    Inventor： Jeong Jin Hong ,  Mihyun Jang

    IPC: G05B13/04 ,  G05B13/02 ,  G06K9/62 ,  G06N5/00 ,  H01L21/67

    CPC classification number: G05B13/048 ,  G05B13/0265 ,  G06K9/6256 ,  G06N5/003 ,  H01L21/67207

    Abstract: The subject matter of this specification can be implemented in, among other things, methods, systems, computer-readable storage medium. A method can include a processing device receiving sensor data indicating a state of an environment of a processing chamber processing a series of substrates according to a substrate processing procedure. The series of substrates may be processed subsequent to a preventive maintenance procedure. The processing device may determine a first set of values based on the sensor data. The set of values may indicate a likelihood an associated substrate comprises a first process result that meets a threshold condition of the substrate processing procedure. The processing device may further predict a first test result based on the first set of values. The first test result may indicate a likelihood a first substrate processed subsequent to processing the series of substrates comprises a second process result that meets the threshold condition.

    MACHINE LEARNING MODEL TRAINING
    5.
    发明申请
    MACHINE LEARNING MODEL TRAINING 有权

    公开(公告)号：US20240393262A1

    公开(公告)日：2024-11-28

    申请号：US18201927

    申请日：2023-05-25

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Jeong Jin Hong ,  Sejune Cheon ,  Sang Hong Kim ,  Thomas Ho Fai Li ,  Anders Andelman Nottrott ,  Zhaozhao Zhu ,  MiHyun Jang

    IPC: G01N21/95 ,  G06T7/00

    Abstract: A method includes receiving spectral data of a substrate and metrology data corresponding to the spectral data of the substrate. The method further includes determining a plurality of feature model configurations for each of a plurality of feature models, each of the plurality of feature model configurations including one or more feature model conditions. The method further includes determining a plurality of feature model combinations, where each feature model combination of the plurality of feature model combinations includes a subset of the plurality of feature model configurations. The method further includes generating a plurality of input datasets, where each input dataset of the plurality of input datasets is generated based on application of the spectral data to a respective feature model combination of the plurality of feature model combinations. The method further includes training a plurality of machine learning models, where each machine learning model is trained to generate an output using an input dataset of the plurality of input datasets and the metrology data. The method further includes selecting a trained machine learning model from the plurality of trained machine learning models satisfying one or more selection criteria.

    POST PREVENTATIVE MAINTENANCE CHAMBER CONDITION MONITORING AND SIMULATION
    7.
    发明申请
    POST PREVENTATIVE MAINTENANCE CHAMBER CONDITION MONITORING AND SIMULATION 有权

    公开(公告)号：US20250021064A1

    公开(公告)日：2025-01-16

    申请号：US18902653

    申请日：2024-09-30

    Applicant: APPLIED MATERIALS, INC.

    Inventor： Jeong Jin Hong ,  Mihyun Jang

    IPC: G05B13/04 ,  G05B13/02 ,  G06F18/214 ,  G06N5/01 ,  H01L21/67

    Abstract: Data associated with processing a series of substrates according to a substrate processing procedure is identified. First predictive data indicating a likelihood that the series of substrates satisfies one or more conditions of the substrate processing procedure is determined based on the identified data. Second predictive data indicating a likelihood that an additional substrate for processing subsequent to processing the series of substrates satisfies the one or more conditions is determined based on the first predictive data. One or more settings of an operation of the substrate processing procedure are altered based on the first predictive data and the second predictive data. The altered one or more settings cause the additional substrate processed subsequent to processing the series of substrates to satisfy the one or more conditions.

    Post preventative maintenance chamber condition monitoring and simulation
    8.
    发明授权
    Post preventative maintenance chamber condition monitoring and simulation 有权

    公开(公告)号：US12135529B2

    公开(公告)日：2024-11-05

    申请号：US17551180

    申请日：2021-12-14

    Applicant: Applied Materials, Inc.

    Inventor： Jeong Jin Hong ,  Mihyun Jang

    IPC: G05B13/04 ,  G05B13/02 ,  G06F18/214 ,  G06N5/01 ,  H01L21/67

    Abstract: The subject matter of this specification can be implemented in, among other things, methods, systems, computer-readable storage medium. A method can include a processing device receiving sensor data indicating a state of an environment of a processing chamber processing a series of substrates according to a substrate processing procedure. The series of substrates may be processed subsequent to a preventive maintenance procedure. The processing device may determine a first set of values based on the sensor data. The set of values may indicate a likelihood an associated substrate comprises a first process result that meets a threshold condition of the substrate processing procedure. The processing device may further predict a first test result based on the first set of values. The first test result may indicate a likelihood a first substrate processed subsequent to processing the series of substrates comprises a second process result that meets the threshold condition.

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