公开(公告)号：US20230073150A1

公开(公告)日：2023-03-09

申请号：US17470418

申请日：2021-09-09

Applicant: Applied Materials, Inc.

Inventor： Shivaprakash Padadayya HIREMATH ,  Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Kirubanandan Naina SHANMUGAM ,  Madhukar KRISHNA ,  Sriharsha DHARMAPURA SATHYANARAYANAMURTHY ,  Sriharish SRINIVASAN

IPC: H01L21/67

Abstract: Embodiments of heated lids for a process chamber are provided herein. In some embodiments, a heated lid includes: a body having a central region and a peripheral region, wherein the body includes a central opening in the central region, wherein the peripheral region includes a plurality of vertical slots that extend into an upper surface of the body and arranged along a circle to provide a thermal break, and wherein the body includes one or more annular plenums that extend into the upper surface of the body and a plurality of holes extending through a bottom surface of the one or more annular plenums to a lower surface of the body; a first heater ring having one or more heating elements disposed therein, wherein the first heater ring is coupled to the central region of the body; and a second heater ring having one or more heating elements disposed therein.

公开(公告)号：US20240420926A1

公开(公告)日：2024-12-19

申请号：US18815687

申请日：2024-08-26

Applicant: Applied Materials, Inc.

Inventor： Michael R. RICE ,  Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Steven D. MARCUS ,  Kirubanandan Naina SHANMUGAM ,  Sriharsha DHARMAPURA SATHYANARAYANAMURTHY ,  Madhukar KRISHNA ,  Shivaprakash Padadayya HIREMATH ,  Senthil Kumar NATTAMAI SUBRAMANIAN ,  Sankar Menon CHERUBALA PATHAYAPURA

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/458 ,  C23C16/46

Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a method for coating a part via atomic layer deposition includes: fastening a workpiece to be coated to an interior volume facing portion of a part coating reactor; and performing an ALD process on the fastened workpiece within the part coating reactor.

公开(公告)号：US20240117491A1

公开(公告)日：2024-04-11

申请号：US17962378

申请日：2022-10-07

Applicant: Applied Materials, Inc.

Inventor： Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Yogesh TOMAR ,  Nikshep M. PATIL ,  Hari Venkatesh RAJENDRAN ,  Kirubanandan Naina SHANMUGAM ,  Gayatri NATU ,  Mahesh ARCOT ,  Senthil Kumar NATTAMAI SUBRAMANIAN ,  Steven D. MARCUS ,  Michael R. RICE

IPC: C23C16/455 ,  C23C16/44

CPC classification number: C23C16/45544 ,  C23C16/4412 ,  C23C16/45557

Abstract: Embodiments of an apparatus for coating a plurality of gas lines are provided herein. In some embodiments, an apparatus for coating a plurality of gas lines via an ALD process includes: an oven having an enclosure that defines an interior volume configured to house the plurality of gas lines, the enclosure having a door configured for transferring the plurality of gas lines into and out of the interior volume; a plurality of inlet ports disposed through a first wall of the enclosure; a plurality of exhaust ports disposed through a second wall of the enclosure; a fluid panel disposed outside of the oven and coupled to the plurality of inlet ports via corresponding ones of a plurality of fluid distribution assemblies; and a foreline disposed outside of the oven and coupled to the plurality of exhaust ports.

公开(公告)号：US20240093367A1

公开(公告)日：2024-03-21

申请号：US17946842

申请日：2022-09-16

Applicant: Applied Materials, Inc.

Inventor： Sriharsha DHARMAPURA SATHYANARAYANAMURTHY ,  Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Kirubanandan Naina SHANMUGAM ,  Manojkumar SHANMUGASUNDARAM ,  Sriharish SRINIVASAN

IPC: C23C16/455

CPC classification number: C23C16/4557 ,  C23C16/45544 ,  C23C16/45565

Abstract: Embodiments of part coating reactors are provided herein. In some embodiments, a part coating reactor includes a lid assembly, comprising: a body that includes a central region and a peripheral region, wherein the body includes a central opening in the central region, a first annular heater groove disposed radially outward of the central opening, and a second annular heater groove disposed radially outward of the first annular heater groove, wherein the peripheral region includes a plurality of vertical slots that extend from an upper surface of the body, and wherein a lower surface of the body includes an annular alignment groove; and a blocker plate including a substantially flat plate having a plurality of holes disposed therethrough and an annular wall extending above and below the flat plate, wherein an upper surface of the annular wall is disposed in the annular alignment groove of the body.

公开(公告)号：US20230074149A1

公开(公告)日：2023-03-09

申请号：US17470294

申请日：2021-09-09

Applicant: Applied Materials, Inc.

Inventor： Michael R. RICE ,  Hanish Kumar PANAVALAPPIL KUMARANKUTTY ,  Steven D. MARCUS ,  Kirubanandan Naina SHANMUGAM ,  Sriharsha DHARMAPURA SATHYANARAYANAMURTHY ,  Madhukar KRISHNA ,  Shivaprakash Padadayya HIREMATH ,  Senthil Kumar NATTAMAI SUBRAMANIAN ,  Sankar Menon CHERUBALA PATHAYAPURA

IPC: C23C16/455

Abstract: Methods and apparatus for coating processing reactor component parts are provided herein. In some embodiments, a part coating reactor includes: a lower body and a lid assembly that together define and enclose an interior volume; one or more heaters disposed in the lid assembly; one or more coolant channels disposed in the lid assembly to flow a heat transfer medium therethrough; a plurality of gas passages disposed through the lid assembly to facilitate providing one or more gases to the interior volume, wherein the plurality of gas passages include a plurality of fluidly independent plenums disposed in the lid assembly; and one or more mounting brackets to facilitate coupling a workpiece to the lid assembly.