公开(公告)号：US20250164580A1

公开(公告)日：2025-05-22

申请号：US18839597

申请日：2022-04-05

Applicant: Applied Materials, Inc.

Inventor： Axel WENZEL ,  Ludwig LEDL ,  Bernhard G. MUELLER

IPC: G01R31/66

Abstract: A method for testing electrical connections of a substrate is described, the substrate having a first surface contact and a first electrical connection extending from the first surface contact. The method includes: (a) discharging the first surface contact by focusing and deflecting a first electron beam having a first electron energy on the first surface contact; (b) charging the first surface contact by focusing and deflecting a second electron beam having a second electron energy different from the first electron energy on the first surface contact; and (c) inspecting the first electrical connection by detecting signal electrons emitted from the substrate. Further described are apparatuses for testing electrical connections of a substrate using two electron beams of different electron energies in accordance with the methods described herein.

公开(公告)号：US20190113470A1

公开(公告)日：2019-04-18

申请号：US15782649

申请日：2017-10-12

Applicant: Applied Materials, Inc.

Inventor： Bernhard G. MUELLER ,  Kulpreet Singh VIRDI ,  Bernhard SCHÜLER ,  Robert TRAUNER ,  Ludwig LEDL

IPC: G01N23/225 ,  H01J37/28 ,  H01J37/21

CPC classification number: G01N23/2251 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/04922 ,  H01J2237/216 ,  H01J2237/2811 ,  H01J2237/2814 ,  H01J2237/2817

Abstract: A method of inspecting a sample with a charged particle beam device is described. The method comprises arranging the sample on a stage, determining a first focusing strength of an objective lens adapted to focus a charged particle beam on a first surface region of the sample that is arranged at a first distance from the objective lens in a direction of an optical axis, calculating a difference between the first distance and a predetermined working distance based on the determined first focusing strength, adjusting a distance between the first surface region and the objective lens by the calculated difference, and inspecting the first surface region. According to a further aspect, a charged particle beam device configured to be operated according to the above method is described.

公开(公告)号：US20180233317A1

公开(公告)日：2018-08-16

申请号：US15431098

申请日：2017-02-13

Applicant: Applied Materials, Inc.

Inventor： Georg JOST ,  Ludwig LEDL ,  Bernhard G. MUELLER ,  George TZENG

IPC: H01J37/02 ,  H01J37/18 ,  H01J37/26

CPC classification number: H01J37/026 ,  H01J37/18 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0047

Abstract: A charge control apparatus for controlling charge on a substrate in a vacuum chamber is described. The apparatus includes a light source emitting a beam of radiation having a divergence; a mirror configured to reflect the beam of radiation, wherein a curvature of a mirror surface of the curved mirror is configured to reduce the divergence of the beam of radiation; and a mirror support configured to rotatably support the curved mirror, wherein a rotation of the mirror varies the direction of the beam of radiation.