公开(公告)号：US20160049313A1

公开(公告)日：2016-02-18

申请号：US14458220

申请日：2014-08-12

Applicant: Applied Materials, Inc.

Inventor： PRABHAT KUMAR ,  Wei-Sheng Lei ,  Martin S. Wohlert ,  James S. Papanu ,  Brad Eaton ,  Ajay Kumar

IPC: H01L21/322 ,  H01L21/67 ,  B01J3/00

CPC classification number: H01L21/3221 ,  H01L21/3081 ,  H01L21/67115 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67393 ,  H01L21/67739 ,  H01L21/67748 ,  H01L21/78

Abstract: Embodiments of the invention include methods and apparatuses for outgassing a workpiece prior to a plasma processing operation. An embodiment of the invention may comprise transferring a workpiece having a mask to an outgassing station that has one or more heating elements. The workpiece may then be heated to an outgassing temperature that causes moisture from the mask layer to be outgassed. After outgassing the workpiece, the workpiece may be transferred to a plasma processing chamber. In an additional embodiment, one or more outgassing stations may be located within a process tool that has a factory interface, a load lock coupled to the factory interface, a transfer chamber coupled to the load lock, and a plasma processing chamber coupled to the transfer chamber. According to an embodiment, an outgassing station may be located within any of the components of the process tool.

Abstract translation: 本发明的实施例包括在等离子体处理操作之前使工件脱气的方法和装置。 本发明的实施例可以包括将具有掩模的工件传送到具有一个或多个加热元件的除气站。 然后可以将工件加热到使得来自掩模层的水分脱气的除气温度。 在对工件进行放气之后，可以将工件转移到等离子体处理室。 在另外的实施例中，一个或多个除气站可以位于处理工具内，该工具具有出厂界面，耦合到出厂界面的负载锁，耦合到负载锁的传送室以及耦合到传送的等离子体处理室 房间。 根据实施例，除气站可以位于处理工具的任何部件内。