公开(公告)号：US20250079207A1

公开(公告)日：2025-03-06

申请号：US18242886

申请日：2023-09-06

Applicant: Applied Materials, Inc.

Inventor： Punyabrahma Panda ,  Tao Zhang ,  Ganapathy Saravanavel ,  Zhi Wang

IPC: H01L21/67 ,  C23C16/52 ,  G01H1/00 ,  H04Q9/00

Abstract: An electronic device manufacturing system is provided that includes a monitoring system coupled to a tool. The monitoring system comprises a body to mount to a surface of a tool; a vibration detecting sensor disposed in or on the body, the vibration detecting sensor to generate a signal based on a vibration of the surface; a wired communication device disposed in or on the body, wherein in a first configuration the wired communication device is to transmit the signal generated by the vibration detecting sensor to the computer system via a wired connection with the computer system; and a wireless communication device disposed in or on the body, wherein in a second configuration the wireless communication device is to establish a wireless connection with the computer system and to transmit the signal generated by the vibration detecting sensor to the computer system via the wireless connection.

公开(公告)号：US20240393761A1

公开(公告)日：2024-11-28

申请号：US18324080

申请日：2023-05-25

Applicant: Applied Materials, Inc.

Inventor： Zhi Wang ,  Tao Zhang ,  Punyabrahma Panda ,  Michael Kutney

IPC: G05B19/402

Abstract: A method includes receiving, by a processing device, position error data from one or more motors of a process chamber. The method further includes performing preprocessing of the position error data. The method further includes transforming the position error data to a frequency domain. The method further includes determining, based on the frequency domain position error data, that a vibration fault has occurred in connection with the process chamber. The method further includes performing a corrective action in view of the vibration fault.