公开(公告)号：US20230323531A1

公开(公告)日：2023-10-12

申请号：US18089388

申请日：2022-12-27

Applicant: Applied Materials, Inc.

Inventor： Joseph Frederick Behnke ,  Carlaton Wong ,  Albert Barrett Hicks, III ,  Steven Darrell Marcus ,  Joseph Frederick Sommers ,  Christopher Laurent Beaudry ,  Timothy Joseph Franklin

IPC: C23C16/40 ,  C23C16/455 ,  C23C16/52

CPC classification number: C23C16/403 ,  C23C16/45544 ,  C23C16/52

Abstract: A method includes affixing a supply apparatus to inlets for one or more channels of a chamber component. The channels provide one or more gas flow paths between a first side of the chamber component that comprises the inlets and a second side of the chamber component comprising outlets of the one or more channels. The method further includes affixing an exhaust apparatus to the outlets of the one or more channels. The method further includes performing a plurality of atomic layer deposition cycles to deposit a corrosion resistant coating on interior surfaces of the one or more channels of the chamber component.