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    System for isolating electrodes at cryogenic temperatures
    1.
    发明授权
    System for isolating electrodes at cryogenic temperatures 有权

    公开(公告)号：US11651986B2

    公开(公告)日：2023-05-16

    申请号：US17159638

    申请日：2021-01-27

    Applicant: Applied Materials, Inc.

    Inventor： Jonathan D. Fischer ,  Steven M. Anella ,  Manohara Kumar

    IPC: H01T23/00 ,  H01L21/683 ,  H01L21/67 ,  H02N13/00

    CPC classification number: H01L21/6833 ,  H01L21/67103 ,  H02N13/00

    Abstract: An insulating system to reduce or eliminate the possibility of arcing while the pressure within a chamber is being varied is disclosed. The system is operable at cryogenic temperatures, such that the insulating system is able to accommodate dimensional changes due to thermal contraction. The insulating system, which includes a housing having one or more bores, is disposed between the two components which are to be electrically connected. An electrical contact, which may be spring loaded, passes through the bore and is used to electrically connect the two components. The ends of the electrical contact are surrounded by an insulating extender which extends from the housing. In one embodiment, a spring-loaded piston is used as the insulating extender. This insulating extender compensates for changes in dimension due to thermal contraction and covers the portion of the electrical contact that extends beyond the outer surface of the housing.

    System For Isolating Electrodes At Cryogenic Temperatures
    2.
    发明申请
    System For Isolating Electrodes At Cryogenic Temperatures 有权

    公开(公告)号：US20220238365A1

    公开(公告)日：2022-07-28

    申请号：US17159638

    申请日：2021-01-27

    Applicant: Applied Materials, Inc.

    Inventor： Jonathan D. Fischer ,  Steven M. Anella ,  Manohara Kumar

    IPC: H01L21/683 ,  H01L21/67

    Abstract: An insulating system to reduce or eliminate the possibility of arcing while the pressure within a chamber is being varied is disclosed. The system is operable at cryogenic temperatures, such that the insulating system is able to accommodate dimensional changes due to thermal contraction. The insulating system, which includes a housing having one or more bores, is disposed between the two components which are to be electrically connected. An electrical contact, which may be spring loaded, passes through the bore and is used to electrically connect the two components. The ends of the electrical contact are surrounded by an insulating extender which extends from the housing. In one embodiment, a spring-loaded piston is used as the insulating extender. This insulating extender compensates for changes in dimension due to thermal contraction and covers the portion of the electrical contact that extends beyond the outer surface of the housing.

    CARBON NANOTUBE ELECTROSTATIC CHUCK
    3.
    发明申请
    CARBON NANOTUBE ELECTROSTATIC CHUCK 有权

    公开(公告)号：US20210225682A1

    公开(公告)日：2021-07-22

    申请号：US16749336

    申请日：2020-01-22

    Applicant: Applied Materials, Inc.

    Inventor： Dawei Sun ,  Steven M. Anella ,  Qin Chen ,  Ron Serisky ,  Julian G. Blake ,  David J. Chipman

    IPC: H01L21/683 ,  B23Q3/154

    Abstract: A platen having improved thermal conductivity and reduced friction is disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivity, thus improving the transfer of heat between the platen and the workpiece. Furthermore, the friction between the carbon nanotubes and the workpiece is much lower than that with conventional embossments, reducing particle generation. In another embodiment, a support plate is disposed on the platen, wherein the carbon nanotubes are disposed on the top surface of the support plate.

    Load lock with integrated features
    4.
    发明授权
    Load lock with integrated features 有权

    公开(公告)号：US11557496B2

    公开(公告)日：2023-01-17

    申请号：US16826970

    申请日：2020-03-23

    Applicant: Applied Materials, Inc.

    Inventor： Michael Blanchard ,  Steven M. Anella ,  Brant S. Binns ,  Jordan B. Tye ,  D. Jeffrey Lischer

    IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673

    Abstract: A cassette with embedded temperature sensors that is disposed within a load lock is disclosed. The temperature sensors may be disposed in a plurality of shelves of the load lock cassette to monitor the temperature of each of a plurality of workpieces disposed in the load lock. The output of these temperature sensors may be provided to a controller, which controls when the load lock is opened. The load lock cassette may also include cooling channels to accelerate the cooling of the workpieces to improve throughput. The cooling may be controlled using closed loop control, where a controller monitors the temperature of the workpieces during the cooling operation.

    Load Lock With Integrated Features
    8.
    发明申请
    Load Lock With Integrated Features 有权

    公开(公告)号：US20210296146A1

    公开(公告)日：2021-09-23

    申请号：US16826970

    申请日：2020-03-23

    Applicant: Applied Materials, Inc.

    Inventor： Michael Blanchard ,  Steven M. Anella ,  Brant S. Binns ,  Jordan B. Tye ,  D. Jeffrey Lischer

    IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673

    Abstract: A cassette with embedded temperature sensors that is disposed within a load lock is disclosed. The temperature sensors may be disposed in a plurality of shelves of the load lock cassette to monitor the temperature of each of a plurality of workpieces disposed in the load lock. The output of these temperature sensors may be provided to a controller, which controls when the load lock is opened. The load lock cassette may also include cooling channels to accelerate the cooling of the workpieces to improve throughput. The cooling may be controlled using closed loop control, where a controller monitors the temperature of the workpieces during the cooling operation.

    Carbon nanotube electrostatic chuck
    9.
    发明授权
    Carbon nanotube electrostatic chuck 有权

    公开(公告)号：US11069554B1

    公开(公告)日：2021-07-20

    申请号：US16749336

    申请日：2020-01-22

    Applicant: Applied Materials, Inc.

    Inventor： Dawei Sun ,  Steven M. Anella ,  Qin Chen ,  Ron Serisky ,  Julian G. Blake ,  David J. Chipman

    IPC: H01L21/683 ,  H01T23/00 ,  B23Q3/154

    Abstract: A platen having improved thermal conductivity and reduced friction is disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivity, thus improving the transfer of heat between the platen and the workpiece. Furthermore, the friction between the carbon nanotubes and the workpiece is much lower than that with conventional embossments, reducing particle generation. In another embodiment, a support plate is disposed on the platen, wherein the carbon nanotubes are disposed on the top surface of the support plate.

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