公开(公告)号：US20250163578A1

公开(公告)日：2025-05-22

申请号：US18627046

申请日：2024-04-04

Applicant: Applied Materials, Inc.

Inventor： Hanhong Chen ,  Kenneth Brian Doering ,  Sanjeev Baluja ,  Chi-Chou Lin ,  Kevin Griffin ,  Joseph AuBuchon ,  Zhejun Zhang ,  Rohit Ode ,  Tejas Umesh Ulavi

IPC: C23C16/455 ,  H01J37/32

Abstract: Plasma showerhead assemblies are disclosed comprising a conductive plate having a plurality of the conductive plate openings, a dielectric faceplate having a thickness and a plurality of dielectric faceplate gas openings extending through the dielectric faceplate thickness in fluid communication with the plurality of the conductive plate gas openings. A conductive insert is disposed within at least one of the dielectric faceplate gas openings or adjacent o-rings included in the plasma showerhead assemblies.

公开(公告)号：US20240304470A1

公开(公告)日：2024-09-12

申请号：US18665683

申请日：2024-05-16

Applicant: Applied Materials, Inc.

Inventor： Akshay Gunaji ,  Tejas Umesh Ulavi ,  Sanjeev Baluja

IPC: H01L21/67 ,  C23C16/455 ,  C23C16/46 ,  F27D5/00 ,  H01L21/687 ,  H05B3/22

CPC classification number: H01L21/67103 ,  C23C16/45544 ,  C23C16/46 ,  F27D5/0037 ,  H01L21/68771 ,  H05B3/22

Abstract: A heater assembly having a top seal and a second seal configured to account for deviation in processing heights and motor runoff of a heater standoff. The top seal is positioned between a shield plate and a top plate and the bottom seal is positioned between a heater mounting base and the heater standoff.