公开(公告)号：US11646173B2

公开(公告)日：2023-05-09

申请号：US17369746

申请日：2021-07-07

Applicant: Applied Materials Israel Ltd.

Inventor： Itay Asulin ,  Emil Weisz ,  Eitam Yitzchak Vinegrad ,  Menachem Lapid ,  Boris Rozensvaig

IPC: H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2448 ,  H01J2237/24475

Abstract: A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.

公开(公告)号：US20240377702A1

公开(公告)日：2024-11-14

申请号：US18784660

申请日：2024-07-25

Applicant: Applied Materials Israel Ltd.

Inventor： Menachem Lapid ,  Roy Kaner ,  Itay Langstadter ,  Yinnon Glickman

IPC: G02F1/33 ,  G02B27/30 ,  G06T7/00

Abstract: A method and a system for illuminating a substrate, the system may include an acousto-optic device (AOD); and an etendue expanding optical module. The AOD may include a surface having an illuminated region; wherein the illuminated region is configured to receive a collimated input beam while being fed with a control signal that causes the illuminated region to output illuminated region output beams that are collimated and exhibit deflection angles that scan, during a scan period, a deflection angular range. The etendue expanding optical module is configured to convert the illuminated region output beams to collimated output beams that impinge on an output aperture; wherein a collimated output beam has a width that exceeds a width of an illuminated region output beam; and wherein the etendue expanding optical module comprises a Dammann grating that is configured to output diffraction patterns, each diffraction pattern comprises diffraction orders that cover a continuous angular range.

公开(公告)号：US20210335569A1

公开(公告)日：2021-10-28

申请号：US17369746

申请日：2021-07-07

Applicant: Applied Materials Israel Ltd.

Inventor： Itay Asulin ,  Emil Weisz ,  Eitam Yitzchak Vinegrad ,  Menachem Lapid ,  Boris Rozensvaig

IPC: H01J37/244 ,  H01J37/28

Abstract: A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.

公开(公告)号：US12092941B2

公开(公告)日：2024-09-17

申请号：US17323911

申请日：2021-05-18

Applicant: Applied Materials Israel Ltd.

Inventor： Menachem Lapid ,  Roy Kaner ,  Itay Langstadter ,  Yinnon Glickman

IPC: G02F1/33 ,  G02B27/30 ,  G06T7/00

CPC classification number: G02F1/33 ,  G02B27/30 ,  G06T7/0004 ,  G06T2207/30148

Abstract: A method and a system for illuminating a substrate, the system may include an acousto-optic device (AOD); and an etendue expanding optical module. The AOD may include a surface having an illuminated region; wherein the illuminated region is configured to receive a collimated input beam while being fed with a control signal that causes the illuminated region to output illuminated region output beams that are collimated and exhibit deflection angles that scan, during a scan period, a deflection angular range. The etendue expanding optical module is configured to convert the illuminated region output beams to collimated output beams that impinge on an output aperture; wherein a collimated output beam has a width that exceeds a width of an illuminated region output beam; and wherein the etendue expanding optical module comprises a Dammann grating that is configured to output diffraction patterns, each diffraction pattern comprises diffraction orders that cover a continuous angular range.

公开(公告)号：US20220373858A1

公开(公告)日：2022-11-24

申请号：US17323916

申请日：2021-05-18

Applicant: Applied Materials Israel Ltd.

Inventor： Menachem Lapid ,  Roy Kaner ,  Itay Langstadter ,  Yinnon Glickman

IPC: G02F1/33 ,  G02B27/12 ,  G02B27/30 ,  H01L21/67 ,  G01N21/95 ,  G01N21/17

Abstract: A method and a system for illuminating a substrate, the system may include an acousto-optic device (AOD); and an etendue expanding optical module. The AOD may include a surface having an illuminated region; wherein the illuminated region is configured to receive a collimated input beam while being fed with a control signal that causes the illuminated region to output illuminated region output beams that are collimated and exhibit deflection angles that scan, during a scan period, a deflection angular range. The etendue expanding optical module is configured to convert the illuminated region output beams to collimated output beams that impinge on an output aperture; wherein a collimated output beam has a width that exceeds a width of an illuminated region output beam; and wherein the etendue expanding optical module comprises a Dammann grating that is configured to output diffraction patterns, each diffraction pattern comprises diffraction orders that cover a continuous angular range.

公开(公告)号：US20220373857A1

公开(公告)日：2022-11-24

申请号：US17323911

申请日：2021-05-18

Applicant: Applied Materials Israel Ltd.

Inventor： Menachem Lapid ,  Roy Kaner ,  ltay Langstadter ,  Yinnon Glickman

IPC: G02F1/33 ,  G02B27/30 ,  G06T7/00

Abstract: A method and a system for illuminating a substrate, the system may include an acousto-optic device (AOD); and an etendue expanding optical module. The AOD may include a surface having an illuminated region; wherein the illuminated region is configured to receive a collimated input beam while being fed with a control signal that causes the illuminated region to output illuminated region output beams that are collimated and exhibit deflection angles that scan, during a scan period, a deflection angular range. The etendue expanding optical module is configured to convert the illuminated region output beams to collimated output beams that impinge on an output aperture; wherein a collimated output beam has a width that exceeds a width of an illuminated region output beam; and wherein the etendue expanding optical module comprises a Dammann grating that is configured to output diffraction patterns, each diffraction pattern comprises diffraction orders that cover a continuous angular range.