公开(公告)号：US10197441B1

公开(公告)日：2019-02-05

申请号：US15883654

申请日：2018-01-30

Applicant: Applied Materials Israel Ltd.

Inventor： Raphael Matthews ,  Tal Kuzniz ,  Pavel Margulis

IPC: G01J1/44

Abstract: A method and a light detector that includes (i) a photon to electron converter a photon to one or more photoelectrons; (ii) a photoelectron detection circuit that includes a photoelectron sensing region; (iii) a chamber; (iv) a bias circuit that is configured to supply to the light detector one or more biasing signals for accelerating a propagation of the one or more photoelectrons within the chamber and towards the photoelectron sensing region; (iv) a photoelectron manipulator that is configured to operate in a selected operational mode out of multiple operational modes that differ by their level of blocking, (v) a controller that is configured to control the photoelectron manipulator based on a feedback about the at least one of (a) the photon, (b) the one or more photoelectrons, (c) a previous photon and, (d) previous one or more photoelectrons.