公开(公告)号：US20150040663A1

公开(公告)日：2015-02-12

申请号：US14386477

申请日：2013-03-13

Applicant: Atlantic Inertial Systems Limited

Inventor： Christopher Paul Fell ,  Rebecka Eley

IPC: G01P15/125 ,  G01C19/5684 ,  G01P15/14

CPC classification number: G01P15/125 ,  G01C19/5684 ,  G01P15/14

Abstract: A vibratory ring structure is described which comprises a ring body and at least one ring electrode secured thereto, the or each ring electrode extending over a first angular extent and: being attached to the ring body over second angular extent, wherein the first angular extent is greater than the second angular extent.

Abstract translation: 描述了一种振动环结构，其包括环体和固定到其上的至少一个环电极，所述或每个环形电极在第一角度范围上延伸，并且：在第二角度范围上附接到环体，其中第一角度范围 大于第二角度范围。

公开(公告)号：US09656858B2

公开(公告)日：2017-05-23

申请号：US14336477

申请日：2014-07-21

Applicant: Atlantic Inertial Systems Limited

Inventor： Tracey Hawke ,  Mark Venables ,  Ian Sturland ,  Rebecka Eley

IPC: H01L21/311 ,  H01L21/302 ,  H01L21/461 ,  H01L29/06 ,  B81C1/00 ,  B81B3/00 ,  H01L21/3065 ,  H01L21/308

CPC classification number: B81C1/00531 ,  B81B3/0064 ,  B81B2201/033 ,  B81B2203/033 ,  B81C1/00388 ,  B81C1/00619 ,  B81C2201/0112 ,  H01L21/3065 ,  H01L21/308

Abstract: A method of reactive ion etching a substrate 46 to form at least a first and a second etched feature (42, 44) is disclosed. The first etched feature (42) has a greater aspect ratio (depth:width) than the second etched feature (44). In a first etching stage the substrate (46) is etched so as to etch only said first feature (42) to a predetermined depth. Thereafter in a second etching stage, the substrate (46) is etched so as to etch both said first and said second features (42, 44) to a respective depth. A mask (40) may be applied to define apertures corresponding in shape to the features (42, 44). The region of the substrate (46) in which the second etched feature (44) is to be produced is selectively masked with a second maskant (50) during the first etching stage, The second maskant (50) is then removed prior to the second etching stage.

公开(公告)号：US09671422B2

公开(公告)日：2017-06-06

申请号：US14386477

申请日：2013-03-13

Applicant: Atlantic Inertial Systems Limited

Inventor： Christopher Paul Fell ,  Rebecka Eley

IPC: G01C19/56 ,  G01P15/125 ,  G01C19/5684 ,  G01P15/14

CPC classification number: G01P15/125 ,  G01C19/5684 ,  G01P15/14

Abstract: A vibratory ring structure is described which comprises a ring body and at least one ring electrode secured thereto, the or each ring electrode extending over a first angular extent and: being attached to the ring body over second angular extent, wherein the first angular extent is greater than the second angular extent.