公开(公告)号：US09631979B2

公开(公告)日：2017-04-25

申请号：US14865903

申请日：2015-09-25

Applicant: Benchmark Technologies

Inventor： Yuqiang Tu ,  Patrick Reynolds

IPC: G01N21/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G03F1/44 ,  G03F7/70566 ,  G03F7/70641

Abstract: Methods and apparatus for characterizing a beam parameter associated with an electromagnetic beam of a light source. The light source exposes a phase-shifted target through a set of focal distances relative to a focal plane of a substrate. At each focal distance of the set, registration values are measured and used to determine one or more registration slopes as a function of focal distance. The registration slopes are compared with baseline registration slopes to characterize the current relative state of the beam parameter in question. Beam parameters that may be characterized in this manner include degree of polarization and polarization rotation relative to an initial polarization direction. Phase shift test patterns advantageously used for beam characterization are described.

公开(公告)号：US09921109B2

公开(公告)日：2018-03-20

申请号：US15487879

申请日：2017-04-14

Applicant: Benchmark Technologies

Inventor： Yuqiang Tu ,  Patrick Reynolds

IPC: G01N21/00 ,  G01J4/04 ,  G03F7/20

CPC classification number: G01J4/04 ,  G03F1/44 ,  G03F7/70566 ,  G03F7/70641

Abstract: Methods for characterizing a beam parameter associated with an electromagnetic beam of a light source. The light source exposes a phase-shifted target through a set of focal distances relative to a focal plane of a substrate. At each focal distance of the set, registration values are measured and used to determine one or more registration slopes as a function of focal distance. The registration slopes are compared with baseline registration slopes to characterize the current relative state of the beam parameter in question. Beam parameters that may be characterized in this manner include degree of polarization and polarization rotation relative to an initial polarization direction. Phase shift test patterns advantageously used for beam characterization are described.

公开(公告)号：US20170089762A1

公开(公告)日：2017-03-30

申请号：US14865903

申请日：2015-09-25

Applicant: Benchmark Technologies

Inventor： Yuqiang Tu ,  Patrick Reynolds

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G03F1/44 ,  G03F7/70566 ,  G03F7/70641

Abstract: Methods and apparatus for characterizing a beam parameter associated with an electromagnetic beam of a light source. The light source exposes a phase-shifted target through a set of focal distances relative to a focal plane of a substrate. At each focal distance of the set, registration values are measured and used to determine one or more registration slopes as a function of focal distance. The registration slopes are compared with baseline registration slopes to characterize the current relative state of the beam parameter in question. Beam parameters that may be characterized in this manner include degree of polarization and polarization rotation relative to an initial polarization direction. Phase shift test patterns advantageously used for beam characterization are described.

公开(公告)号：US20170219435A1

公开(公告)日：2017-08-03

申请号：US15487879

申请日：2017-04-14

Applicant: Benchmark Technologies

Inventor： Yuqiang Tu ,  Patrick Reynolds

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G03F1/44 ,  G03F7/70566 ,  G03F7/70641

Abstract: Methods for characterizing a beam parameter associated with an electromagnetic beam of a light source. The light source exposes a phase-shifted target through a set of focal distances relative to a focal plane of a substrate. At each focal distance of the set, registration values are measured and used to determine one or more registration slopes as a function of focal distance. The registration slopes are compared with baseline registration slopes to characterize the current relative state of the beam parameter in question. Beam parameters that may be characterized in this manner include degree of polarization and polarization rotation relative to an initial polarization direction. Phase shift test patterns advantageously used for beam characterization are described.