公开(公告)号：US20140264068A1

公开(公告)日：2014-09-18

申请号：US14354227

申请日：2012-10-30

Applicant: BROOKS AUTOMATION, INC.

Inventor： Gerardo A. Brucker ,  G. Jefferey Rathbone ,  Brian J. Horvath ,  Timothy C. Swinney ,  Stephen C. Blouch ,  Jeffrey G. McCarthy ,  Timothy R. Piwonka-Corle

IPC: H01J49/42

CPC classification number: H01J49/4245 ,  H01J27/205 ,  H01J49/0009 ,  H01J49/0031 ,  H01J49/147

Abstract: An apparatus includes an electrostatic ion trap and electronics configured to measure parameters of the ion trap and configured to adjust ion trap settings based on the measured parameters. A method of tuning the electrostatic ion trap includes, under automatic electronic control, measuring parameters of the ion trap and adjusting ion trap settings based on the measured parameters.

Abstract translation: 一种装置包括静电离子阱和被配置为测量离子阱的参数并被配置为基于测量的参数来调整离子阱设置的电子器件。 调整静电离子阱的方法包括在自动电子控制下，基于测量参数测量离子阱的参数和调整离子阱设置。

公开(公告)号：US20140152320A1

公开(公告)日：2014-06-05

申请号：US14174386

申请日：2014-02-06

Applicant: Brooks Automation, Inc.

Inventor： Gerardo A. Brucker

IPC: G01L21/30

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。