公开(公告)号：US09404827B2

公开(公告)日：2016-08-02

申请号：US14174386

申请日：2014-02-06

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker

IPC: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

公开(公告)号：US20150300904A1

公开(公告)日：2015-10-22

申请号：US14377449

申请日：2013-02-07

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker

IPC: G01L19/06 ,  H01J41/02 ,  H01J1/52 ,  G01L21/30

CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

公开(公告)号：US20110062961A1

公开(公告)日：2011-03-17

申请号：US12860050

申请日：2010-08-20

Applicant: Gerardo A. Brucker

Inventor： Gerardo A. Brucker

IPC: G01L21/30

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

公开(公告)号：US20090015264A1

公开(公告)日：2009-01-15

申请号：US11827370

申请日：2007-07-11

Applicant: Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

Inventor： Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

IPC: G01L21/34

CPC classification number: G01L21/34 ,  H01J41/02

Abstract: An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge.

Abstract translation: 一种电离计，消除热阴极或灯丝，但保持接近热阴极电离计的气体密度测量精度水平。 电离计包括设置在离子化体积中的集电极，不具有加热阴极的电子源和调节电子源和电离体积之间的电子流的静电快门。 基于来自限定电离体积的阳极的反馈，静电快门控制电子流。 电子源可以是Penning或辉光放电电离计。

公开(公告)号：US06515482B2

公开(公告)日：2003-02-04

申请号：US09770656

申请日：2001-01-29

Applicant: Yousuke Kawasaki

Inventor： Yousuke Kawasaki

IPC: G01L2130

CPC classification number: G01L21/32 ,  H01J41/02

Abstract: An ionization vacuum gauge which can stably perform measurements of pressure in the intermediate vacuum to high vacuum regions, that is performed by an ionization-type first measurement element, as well as in the measurement region intrinsic to a second measurement element. This ionization vacuum gauge comprises a measurement element vessel, and first and second measurement parts provided within this measurement element vessel. The first measurement part comprises component electrodes including a filament, grid and ion collector, and is of an ionization-type construction for measurement of the pressure of vacuum states. The second measurement part is of a construction having different functions from those of the first measurement part, and is disposed in a space that is near the extension of the grid axis, and is away from the principal space for flying of thermal electrons emitted from the filament. A shield plate is provided between the second measurement part and the component electrodes, to spatially separate the second measurement part and the component electrodes. The second measurement part is fixed to an element fastening plate made from a material with excellent thermal conductivity.

Abstract translation: 一种电离真空计，其可以稳定地执行中间真空中的压力到高真空区域的测量，其由电离型第一测量元件以及第二测量元件固有的测量区域进行。 该电离真空计包括测量元件容器，以及设置在该测量元件容器内的第一和第二测量部件。 第一测量部件包括包括灯丝，栅格和离子收集器的元件电极，并且是用于测量真空状态的压力的电离型结构。 第二测量部件具有与第一测量部件不同的功能的结构，并且设置在靠近网格轴的延伸部的空间中，并且远离主空间，用于使从 灯丝。 在第二测量部件和部件电极之间设置屏蔽板，以在空间上分离第二测量部件和部件电极。 第二测量部件被固定到由具有优异导热性的材料制成的元件紧固板。

公开(公告)号：US2884591A

公开(公告)日：1959-04-28

申请号：US29558552

申请日：1952-06-25

Applicant: SNYDER VERNE D

Inventor： SNYDER VERNE D

IPC: G01M3/20 ,  H01J41/02

CPC classification number: H01J41/02 ,  G01M3/202

公开(公告)号：US09995839B2

公开(公告)日：2018-06-12

申请号：US15311937

申请日：2015-05-22

Applicant: Gerd Reime

Inventor： Gerd Reime

IPC: G01R27/28 ,  G01V3/10 ,  G01R27/26 ,  G01R27/00 ,  G01N27/02 ,  G01N27/62 ,  H01J41/02 ,  H01J41/00 ,  G01N27/64

CPC classification number: G01V3/10 ,  G01N27/028 ,  G01N27/62 ,  G01N27/64 ,  G01R27/00 ,  G01R27/26 ,  G01R27/2611 ,  G01R27/267 ,  H01J41/00 ,  H01J41/02

Abstract: In a method for determining at least one physical parameter, a sensor unit which is activated by at least one periodic excitation (1.4) is provided, wherein the sensor unit has at least one detection region in which changes of the parameter in the surroundings of the sensor unit lead to output signal (1.7) from the sensor unit. The sensor unit is wired such that if there are no changes of the parameter in the detection region the output signal (1.7) is a zero signal or virtually a zero signal at the output of the sensor unit, whereas if there are changes of the parameter in the detection region the output signal (1.7) is a signal that is not zero and has a specific amplitude and phase. In a closed control loop, the non-zero signal in the receive path is adjusted to zero using a control signal to achieve an adjusted state even in the presence of changes of the parameter in the detection region. The control signal is evaluated in order to determine the physical parameter. The output signal (1.7) from the sensor unit is reduced substantially to the fundamental wave of the excitation (1.4) and the output signal (1.7) is controlled to zero in the entire phase space by means of at least one pulse width modulation. A temperature-stable, fully digital measuring system is provided as a result of the fact that the at least one pulse width modulation itself generates a correction signal with a variable pulse width and possibly a variable phase which is then added to the output signal (1.7) from the sensor unit and the output signal is thereby controlled to zero in the entire phase space, wherein the pulse width of the correction signal and/or the phase of the correction signal is/are determined by the deviations of the output signal (1.7) from zero.

公开(公告)号：US08947098B2

公开(公告)日：2015-02-03

申请号：US13051430

申请日：2011-03-18

Applicant: Larry K. Carmichael ,  Jesse A. Weber ,  John H. Henry ,  Michael N. Schott ,  Gerardo A. Brucker ,  Kenneth D. Van Antwerp, Jr.

Inventor： Larry K. Carmichael ,  Jesse A. Weber ,  John H. Henry ,  Michael N. Schott ,  Gerardo A. Brucker ,  Kenneth D. Van Antwerp, Jr.

IPC: G01L21/30 ,  G01L21/32 ,  H01J41/02

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01N27/60 ,  G01N27/62 ,  H01J41/02

Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.

Abstract translation: 测量压力的电离计具有发射电子的电子源和限定电离空间的阳极。 该量规还包括收集电极以收集由电子和气体之间的冲击形成的离子，并且基于收集的离子来测量压力。 电子源在取决于压力的多个排放水平和除压力之外的第二参数的发射电流之间动态变化。 电离计还可以根据存储在非易失性存储器中并由用户选择的参数来改变量规组件的各种操作参数。

公开(公告)号：US07906971B2

公开(公告)日：2011-03-15

申请号：US12250785

申请日：2008-10-14

Applicant: Benjamin Aaron Boardwine ,  Derrick Lamont Journiette

Inventor： Benjamin Aaron Boardwine ,  Derrick Lamont Journiette

IPC: G01L21/30

CPC classification number: G01N27/62 ,  H01J41/02

Abstract: A system for measuring gas density in a vacuum includes a gauge, a housing for containing the gauge, and a magnet secured to an exterior surface of the housing. The magnet is a flexible magnetic strips, and positioned around the exterior surface of the housing. The gauge includes grid insulator posts extending longitudinally along a tubular section of the housing, and the magnet is secured to the exterior surface of the housing adjacent to the grid insulator posts, and oriented transversely to the grid insulator posts. The magnet is a flexible magnetic strip, and a clamp secures the magnet to the exterior surface of the housing.

Abstract translation: 用于测量真空中气体密度的系统包括测量计，用于容纳测量计的壳体和固定到壳体的外表面的磁体。 磁体是柔性磁条，并且围绕壳体的外表面定位。 该测量仪包括沿壳体的管状部分纵向延伸的栅格绝缘体柱，并且磁体固定到壳体的与栅格绝缘体柱相邻的外表面，并横向于栅格绝缘体柱。 磁体是柔性磁条，夹具将磁体固定在外壳的外表面上。

公开(公告)号：US5773833A

公开(公告)日：1998-06-30

申请号：US620635

申请日：1996-03-22

Applicant: Peter C. Hsi

Inventor： Peter C. Hsi

IPC: G01N27/64 ,  G01N27/66 ,  G01N33/00 ,  H01J41/02

CPC classification number: G01N27/64 ,  G01N27/66 ,  G01N33/0047 ,  H01J41/02

Abstract: A photo-ionization detector (PID) which measures volatile organic gas uses electrically insulated parallel plates to energize a miniaturized gas discharge UV lamp and an energy efficient method to modulate the UV lamp intensity and reduce power consumption. A miniaturized centrifugal pump is integrated into the PID to provide active sampling for fast response to volatile gas. An ionization chamber in the PID includes a UV shield which protects a measurement electrode from UV light and a UV monitor which measures changes in UV intensity due to external interferences and UV lamp variations. A microprocessor in the PID uses measurements from the measurement electrode and from the UV monitor to accurately account for UV intensity variations when determining a volatile gas concentration.

Abstract translation: 测量挥发性有机气体的光电离检测器（PID）使用电绝缘平行板来激励小型化气体放电UV灯和能量效率方法来调节UV灯强度并降低功耗。 PID集成了一台小型化离心泵，为挥发性气体快速响应提供主动取样。 PID中的电离室包括保护测量电极免受紫外线的UV屏蔽和测量由于外部干扰和UV灯变化引起的UV强度变化的UV监视器。 PID中的微处理器使用来自测量电极和UV监测器的测量来精确计算确定挥发性气体浓度时的紫外线强度变化。