公开(公告)号：US09978623B2

公开(公告)日：2018-05-22

申请号：US14822392

申请日：2015-08-10

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  William Fosnight ,  Robert C. May ,  William Weaver

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67766 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67213 ,  H01L21/67225 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67393 ,  H01L21/67742 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/14

Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

公开(公告)号：US11201070B2

公开(公告)日：2021-12-14

申请号：US15986710

申请日：2018-05-22

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  William Fosnight ,  Robert C. May ,  William Weaver

IPC: H01L21/673 ,  H01L21/677 ,  H01L21/67

Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

公开(公告)号：US20180269094A1

公开(公告)日：2018-09-20

申请号：US15986710

申请日：2018-05-22

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  William Fosnight ,  Robert C. May ,  William Weaver

IPC: H01L21/677 ,  H01L21/673 ,  H01L21/67

CPC classification number: H01L21/67766 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67213 ,  H01L21/67225 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67393 ,  H01L21/67742 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/14

Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

公开(公告)号：US20160035608A1

公开(公告)日：2016-02-04

申请号：US14822392

申请日：2015-08-10

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  William Fosnight ,  Robert C. May ,  William Weaver

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67766 ,  H01L21/67201 ,  H01L21/67207 ,  H01L21/67213 ,  H01L21/67225 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67393 ,  H01L21/67742 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/14

Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.