MOTION SENSOR INTEGRATED NANO-PROBE N/MEMS APPARATUS, METHOD, AND APPLICATIONS
    1.
    发明申请
    MOTION SENSOR INTEGRATED NANO-PROBE N/MEMS APPARATUS, METHOD, AND APPLICATIONS 审中-公开
    运动传感器综合纳米探针N / MEMS装置,方法和应用

    公开(公告)号:US20140331367A1

    公开(公告)日:2014-11-06

    申请号:US14364745

    申请日:2012-12-17

    CPC classification number: G01Q20/00 G01Q10/00 G01Q60/30 G01Q70/06 G01Q70/08

    Abstract: A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.

    Abstract translation: 使用多头纳米探针装置的多尖端纳米探针装置和探测样品的方法各自使用位于基底上方:(1)相对于基底的不可移动的探针尖端; (2)相对于基板的可动探针尖端; 和(3)与可移动探针尖端连接的运动传感器。 多尖头纳米探针装置和相关方法提供了由于运动传感器与可移动探针尖端的紧密耦合而引起的改进的样本探测,以及可移动探针尖端相对于不可移动的探针尖端的可缩回性。

    Motion sensor integrated nano-probe N/MEMS apparatus, method, and applications

    公开(公告)号:US10048289B2

    公开(公告)日:2018-08-14

    申请号:US14364745

    申请日:2012-12-17

    Abstract: A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.

    MOTION SENSOR INTEGRATED NANO-PROBE N/MEMS APPARATUS, METHOD, AND APPLICATIONS

    公开(公告)号:US20190018039A1

    公开(公告)日:2019-01-17

    申请号:US16018530

    申请日:2018-06-26

    Abstract: A multi-tip nano-probe apparatus and a method for probing a sample while using the multi-tip nano-probe apparatus each employ located over a substrate: (1) an immovable probe tip with respect to the substrate; (2) a movable probe tip with respect to the substrate; and (3) a motion sensor that is coupled with the movable probe tip. The multi-tip nano-probe apparatus and related method provide for improved sample probing due to close coupling of the motion sensor with the movable probe tip, and also retractability of the movable probe tip with respect to the immovable probe tip.

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