公开(公告)号：US20220250964A1

公开(公告)日：2022-08-11

申请号：US17591916

申请日：2022-02-03

Applicant: CORNING INCORPORATED

Inventor： Michael John Campion ,  Kenneth Edward Hrdina ,  John Edward Maxon

IPC: C03C3/06 ,  C03B19/06 ,  C03B19/09

Abstract: A silica-titania glass substrate comprising: (i) a composition comprising 5 weight percent to 10 weight percent TiO2; (ii) a coefficient of thermal expansion (CTE) at 20° C. in a range from −45 ppb/K to +20 ppb/K; (iii) a crossover temperature (Tzc) in a range from 10° C. to 50° C.; (iv) a slope of CTE at 20° C. in a range from 1.20 ppb/K2 to 1.75 ppb/K2; (v) a refractive index variation of less than 140 ppm; and (vi) 600 ppm OH group concentration or greater. The substrate can have a mass of 1 kg or greater and less than 0.05 gas inclusions per cubic inch via a method comprising (i) forming the substrate from soot particles comprising SiO2 and TiO2, and (ii) subjecting the substrate to an environment having an elevated temperature and an elevated pressure for a period of time until the substrate comprises less than 0.05 gas inclusions per cubic inch.

公开(公告)号：US20150218039A1

公开(公告)日：2015-08-06

申请号：US14604998

申请日：2015-01-26

Applicant: Corning Incorporated

Inventor： William R. Angell, IV ,  Sezhian Annamalai ,  Carlos Alberto Duran ,  John Edward Maxon

IPC: C03C3/076 ,  C03B19/09 ,  C03C3/06

CPC classification number: C03C3/076 ,  C03B19/09 ,  C03B19/1407 ,  C03B19/1415 ,  C03B2201/42 ,  C03B2207/50 ,  C03C3/06 ,  C03C3/062 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/10 ,  C03C2203/40 ,  G03F1/24 ,  G03F1/60

Abstract: A glass article for use in Extreme Ultra-Violet Lithography (EUVL) is provided. The glass article includes a silica-titania glass having a compositional gradient through the glass article, the compositional gradient being defined by the functions: [TiO2]=(c+f(x,y,z)), and [SiO2]=(100−{c+f(x,y,z)}−δ(x,y,z)) wherein [TiO2] is the concentration of titania in wt. %, [SiO2] is the concentration of silica in wt. %, c is the titania concentration in wt. % for a predetermined zero crossover temperature (Tzc), f(x, y, z) is a function in three-dimensional space that defines the difference in average composition of a volume element centered at the coordinates (x, y, z) with respect to c, and δ(x, y, z) is a function in three-dimensional space that defines the sum of all other components of a volume element centered at the coordinates (x, y, z).

Abstract translation: 提供了一种用于极光紫外光刻（EUVL）的玻璃制品。 玻璃制品包括通过玻璃制品具有组成梯度的二氧化硅 - 二氧化钛玻璃，组成梯度由以下功能定义：[TiO 2] =（c + f（x，y，z））和[SiO 2] =（ 100- {c + f（x，y，z）}-δ（x，y，z））其中[TiO 2]是二氧化钛的重量浓度。 ％，[SiO2]是二氧化硅的重量浓度。 ％，c是以重量计的二氧化钛浓度。 对于预定的零交叉温度（Tzc），f（x，y，z）是三维空间中的函数，其定义以坐标（x，y，z）为中心的体积元素的平均成分的差异与 对于c而言，δ（x，y，z）是定义以坐标（x，y，z）为中心的体元素的所有其他分量的和的三维空间中的函数。

公开(公告)号：US20240417308A1

公开(公告)日：2024-12-19

申请号：US18678834

申请日：2024-05-30

Applicant: CORNING INCORPORATED

Inventor： William Robert Angell, IV ,  John Edward Maxon

IPC: C03C3/076 ,  C03B19/14

Abstract: A titania and silica glass body that includes a first glass section having a crossover temperature of about 10° C. to about 60° C. and a second glass section comprising an average striae height of about 10 microns or less, wherein the average striae height of the second glass section is less than an average striae height of the first glass section, and wherein the first glass section and the second glass section form a single, monolithic glass body.

公开(公告)号：US20240067558A1

公开(公告)日：2024-02-29

申请号：US18235934

申请日：2023-08-21

Applicant: CORNING INCORPORATED

Inventor： Michael John Campion ,  Alex Gabriel Duran Buchsbaum ,  John Edward Maxon

IPC: C03C3/076 ,  G03F1/00

CPC classification number: C03C3/076 ,  G03F1/00

Abstract: A glass comprising titania and silica is disclosed. A plot of average hydroxyl concentration of each segment of a plurality of segments vs. distance along the glass is provided by: y=Ax2+Bx+C, wherein A (in ppm/mm2) is in a range from about 0.0 to about −0.1, B (in ppm/mm) is in a range from about −10 to about 10, C (in ppm) is about 450 or less, y is the average hydroxyl concentration (in ppm), and x is distance (in mm) such that the hydroxyl concentration of each segment is measured using a Fourier transform infrared spectroscopy in transmission and the plot extends a distance of about 50 mm or more along the glass.

公开(公告)号：US20230312387A1

公开(公告)日：2023-10-05

申请号：US18127351

申请日：2023-03-28

Applicant: CORNING INCORPORATED

Inventor： William Robert Angell, IV ,  John Edward Maxon ,  Jeffrey Lee Sunderland

IPC: C03B19/14

CPC classification number: C03B19/1423 ,  C03B2201/42 ,  C03B2207/32 ,  C03B2207/36

Abstract: A process for producing a glass body, the process including flowing oxygen gas from a burner in a furnace at a flow rate of greater than 12.0 standard liters per minute and flowing a precursor gas mixture from the burner. The process further including oxidizing the precursor gas mixture with the oxygen gas to form glass particles and depositing the glass particles on a collection cup to form the glass body.

公开(公告)号：US09382151B2

公开(公告)日：2016-07-05

申请号：US14604998

申请日：2015-01-26

Applicant: Corning Incorporated

Inventor： William R. Angell, IV ,  Sezhian Annamalai ,  Carlos Alberto Duran ,  John Edward Maxon

IPC: C03C3/06 ,  C03C3/076 ,  C03B19/09 ,  C03C3/062 ,  C03B19/14 ,  G03F1/24

CPC classification number: C03C3/076 ,  C03B19/09 ,  C03B19/1407 ,  C03B19/1415 ,  C03B2201/42 ,  C03B2207/50 ,  C03C3/06 ,  C03C3/062 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/10 ,  C03C2203/40 ,  G03F1/24 ,  G03F1/60

Abstract: A glass article for use in Extreme Ultra-Violet Lithography (EUVL) is provided. The glass article includes a silica-titania glass having a compositional gradient through the glass article, the compositional gradient being defined by the functions: [TiO2]=(c+f(x,y,z)), and [SiO2]=(100−{c+f(x,y,z)}−δ(x,y,z)) wherein [TiO2] is the concentration of titania in wt. %, [SiO2] is the concentration of silica in wt. %, c is the titania concentration in wt. % for a predetermined zero crossover temperature (Tzc), f(x, y, z) is a function in three-dimensional space that defines the difference in average composition of a volume element centered at the coordinates (x, y, z) with respect to c, and δ(x, y, z) is a function in three-dimensional space that defines the sum of all other components of a volume element centered at the coordinates (x, y, z).

Abstract translation: 提供了一种用于极光紫外光刻（EUVL）的玻璃制品。 玻璃制品包括通过玻璃制品具有组成梯度的二氧化硅 - 二氧化钛玻璃，组成梯度由以下功能定义：[TiO 2] =（c + f（x，y，z））和[SiO 2] =（ 100- {c + f（x，y，z）}-δ（x，y，z））其中[TiO 2]是二氧化钛的重量浓度。 ％，[SiO2]是二氧化硅的重量浓度。 ％，c是以重量计的二氧化钛浓度。 对于预定的零交叉温度（Tzc），f（x，y，z）是三维空间中的函数，其定义以坐标（x，y，z）为中心的体积元素的平均成分的差异与 对于c而言，δ（x，y，z）是定义以坐标（x，y，z）为中心的体元素的所有其他分量的和的三维空间中的函数。

公开(公告)号：US20240069429A1

公开(公告)日：2024-02-29

申请号：US18235951

申请日：2023-08-21

Applicant: CORNING INCORPORATED

Inventor： Michael John Campion ,  Kenneth Edward Hrdina ,  Nicolas LeBlond ,  John Edward Maxon

IPC: G03F1/24 ,  C03C3/06 ,  C03C3/076 ,  C03C4/08

CPC classification number: G03F1/24 ,  C03C3/06 ,  C03C3/076 ,  C03C4/085 ,  C03C2204/00

Abstract: A glass including silica and titania is disclosed. An average hydroxyl concentration of a plurality segments of the glass is in a range from about 20 ppm to about 450 ppm, an average titania concentration of the plurality of segments is in a range from about 6 wt. % to about 12 wt. %, and each segment of the plurality of segments has a length of about 12.7 mm, a width of about 12.7 mm, and a height of about 7.62 mm. The hydroxyl concentration of each segment is measured using a Fourier transform infrared spectroscopy in transmission, the refractive index is measured using an optical interferometer with a 633 nm operating wavelength and a resolution of 270 microns×270 microns pixel size, and the average titania concentration is determined based upon the measured refractive index.