公开(公告)号：US20240212978A1

公开(公告)日：2024-06-27

申请号：US18599199

申请日：2024-03-08

Applicant: COXEM CO.,LTD

Inventor： Jun Hee LEE

IPC: H01J37/28 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J2237/2801

Abstract: The present invention provides a detachable column unit of a scanning electron microscope, and a method of providing the same, wherein the detachable column unit allows the column to be attached to and detached from the sample installation unit, and allows a simple correction related to the column, beam distortion, replacement of consumables, etc. Since problems related to the column are solved by replacing the column, the column has the advantage of being simple and easy to repair and maintain.

公开(公告)号：US20220189732A1

公开(公告)日：2022-06-16

申请号：US17436655

申请日：2020-02-27

Applicant: COXEM CO.,LTD

Inventor： Jun Hee LEE

IPC: H01J37/28 ,  H01J37/20

Abstract: A scanning electron microscope according to the present invention enables a column to be detached from a sample installation unit, thereby addressing issues related to the column, such as simple calibration related to the column, tilt of a beam, replacement of consumables, etc., by replacing the entire column. As such, the scanning electron microscope has the advantage of being simply and easily repaired and maintained.