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公开(公告)号：US08872123B2
公开(公告)日：2014-10-28
申请号：US13738923
申请日：2013-01-10
Applicant: Cymer, Inc.
Inventor： James Crouch , Robert Jacques , Matthew R. Graham , Andrew Liu
Abstract: Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.
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2.发明申请Method of Timing Laser Beam Pulses to Regulate Extreme Ultraviolet Light Dosing 有权激光束脉冲定时调节极紫外光量的方法公开(公告)号：US20140191132A1
公开(公告)日：2014-07-10
申请号：US13738918
申请日：2013-01-10
Applicant: CYMER, INC.
Inventor： Alexander Schafgans , James Crouch , Matthew R. Graham , Steven Chang , Paul Frihauf , Andrew Liu , Wayne Dunstan
IPC: G21K5/00
Abstract: Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.
Abstract translation: 这里描述了通过调整激光激光束脉冲的定时来控制从激光产生的等离子体极紫外光系统输出能量的方法的实施例。 在频闪发射期间，脉冲被定时以液滴滴定，直到达到EUV的剂量目标。 一旦累积的EUV达到剂量目标，脉冲被定时，以便在分组的其余部分期间不会液滴，从而防止在分组的那些部分期间产生额外的EUV光。 在连续脉冲串模式中，脉冲被定时以照射液滴，直到累积脉冲串错误达到或超过阈值脉冲串错误。 如果累积突发错误满足或超过阈值突发错误，则下一个脉冲被定时以不照射下一个液滴。 因此，本文所述的实施例操纵脉冲定时以获得可以更精确地匹配下游计量要求的恒定的期望剂量目标。
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公开(公告)号：US20140191133A1
公开(公告)日：2014-07-10
申请号：US13738923
申请日：2013-01-10
Applicant: CYMER, INC.
Inventor： James Crouch , Robert Jacques , Matthew R. Graham , Andrew Liu
IPC: G21K5/00
Abstract: Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.
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4.发明授权Method of timing laser beam pulses to regulate extreme ultraviolet light dosing 有权定时激光束脉冲调节极紫外光量的方法公开(公告)号：US08872122B2
公开(公告)日：2014-10-28
申请号：US13738918
申请日：2013-01-10
Applicant: Cymer, Inc.
Inventor： Alexander Schafgans , James Crouch , Matthew R. Graham , Steven Chang , Paul Frihauf , Andrew Liu , Wayne Dunstan
Abstract: Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.
Abstract translation: 这里描述了通过调整激光激光束脉冲的定时来控制从激光产生的等离子体极紫外光系统输出能量的方法的实施例。 在频闪发射期间，脉冲被定时以液滴滴定，直到达到EUV的剂量目标。 一旦累积的EUV达到剂量目标，脉冲被定时，以便在分组的剩余部分期间不会液滴，从而防止在分组的那些部分期间产生额外的EUV光。 在连续脉冲串模式中，脉冲被定时以照射液滴，直到累积脉冲串错误达到或超过阈值脉冲串错误。 如果累积突发错误满足或超过阈值突发错误，则下一个脉冲被定时以不照射下一个液滴。 因此，本文所述的实施例操纵脉冲定时以获得可以更精确地匹配下游计量要求的恒定的期望剂量目标。
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