公开(公告)号：US11740148B2

公开(公告)日：2023-08-29

申请号：US17021694

申请日：2020-09-15

Applicant: CareFusion 303, Inc.

Inventor： Timothy Adam Walsh ,  Christian Sandmann

IPC: G01L9/00 ,  B81B3/00 ,  A61M5/168 ,  A61M5/172 ,  C30B29/06 ,  H10N30/30

CPC classification number: G01L9/0022 ,  A61M5/16854 ,  A61M5/16877 ,  A61M5/16886 ,  A61M5/172 ,  B81B3/0021 ,  C30B29/06 ,  H10N30/308 ,  A61M2205/3331 ,  A61M2205/3334 ,  A61M2205/3368 ,  B81B2201/0264 ,  B81B2201/05

Abstract: A sensor for use in a fluid flow application is provided. The sensor includes an inlet chamber configured to receive a fluid flow from a first conduit, an outlet chamber configured to provide the fluid flow to a second conduit, and a membrane separating the inlet chamber from the outlet chamber, the membrane including a fluid passage to allow the fluid flow from the inlet chamber to the outlet chamber. The sensor also includes a circuit component disposed on the membrane, having an electrical property configured to change according to a deformation of the membrane, and a conductor formed on a substrate and coupled with the circuit component, to provide an electrical signal based on a change in the electrical property of the circuit component. The membrane includes an epitaxial layer formed on the substrate. Methods for fabricating and using the above sensor are also presented.

公开(公告)号：US10809139B2

公开(公告)日：2020-10-20

申请号：US15896375

申请日：2018-02-14

Applicant: CareFusion 303, Inc.

Inventor： Timothy Adam Walsh ,  Christian Sandmann

IPC: G01L9/00 ,  A61M5/168 ,  A61M5/172 ,  B81B3/00 ,  H01L41/113

Abstract: A sensor for use in a fluid flow application is provided. The sensor includes an inlet chamber configured to receive a fluid flow from a first conduit, an outlet chamber configured to provide the fluid flow to a second conduit, and a membrane separating the inlet chamber from the outlet chamber, the membrane including a fluid passage to allow the fluid flow from the inlet chamber to the outlet chamber. The sensor also includes a circuit component disposed on the membrane, having an electrical property configured to change according to a deformation of the membrane, and a conductor formed on a substrate and coupled with the circuit component, to provide an electrical signal based on a change in the electrical property of the circuit component. The membrane includes an epitaxial layer formed on the substrate. Methods for fabricating and using the above sensor are also presented.