公开(公告)号：US10955368B2

公开(公告)日：2021-03-23

申请号：US14455811

申请日：2014-08-08

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Champ Gohil ,  Richard Moralee

IPC: G01N23/225 ,  G06T7/11 ,  H01J37/28 ,  G06T7/00 ,  G06F3/0484

Abstract: A data analysis system is disclosed for generating analysis data depending on microscopic data of an object generated by a charged particle microscope. The microscopic data includes an image showing a structure. A graphical representation of the structure is displayed on the display by the graphical user interface. Separation data is generated representing at least one path of a separation cut, which separates pixels of the structure from each other. The separation cut is visually marked by the graphical user interface, depending on the separation data, by differently marking different area portions of the representation, which represent different pixels of the structure which are separated from each other by the separation cut. Separate analysis data are generated for each of at least two portions of the object, depending on the microscopic data and depending on the separation data.

公开(公告)号：US20150046097A1

公开(公告)日：2015-02-12

申请号：US14455811

申请日：2014-08-08

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Champ Gohil ,  Richard Moralee

IPC: G01N23/225 ,  G06T7/00 ,  G06F3/0484

CPC classification number: G01N23/225 ,  G06F3/04845 ,  G06T7/0004 ,  G06T7/11 ,  G06T2200/24 ,  G06T2207/10061 ,  G06T2207/20104 ,  G06T2207/20112 ,  H01J37/28 ,  H01J2237/225 ,  H01J2237/2806 ,  H01J2237/2807

Abstract: A data analysis system is disclosed for generating analysis data depending on microscopic data of an object generated by a charged particle microscope. The microscopic data includes an image showing a structure. A graphical representation of the structure is displayed on the display by the graphical user interface. Separation data is generated representing at least one path of a separation cut, which separates pixels of the structure from each other. The separation cut is visually marked by the graphical user interface, depending on the separation data, by differently marking different area portions of the representation, which represent different pixels of the structure which are separated from each other by the separation cut. Separate analysis data are generated for each of at least two portions of the object, depending on the microscopic data and depending on the separation data.

Abstract translation: 公开了一种用于根据由带电粒子显微镜产生的物体的微观数据产生分析数据的数据分析系统。 微观数据包括显示结构的图像。 结构的图形表示由图形用户界面显示在显示屏上。 产生分离数据，代表分离切片的至少一个路径，其将结构的像素彼此分离。 取决于分离数据，通过不同地标记表示的不同区域部分，通过分离切割彼此分离的结构的不同像素，通过图形用户界面来视觉地标记分割。 根据微观数据和取决于分离数据，对对象的至少两个部分中的每一个生成分离分析数据。