公开(公告)号：US09293659B2

公开(公告)日：2016-03-22

申请号：US14694553

申请日：2015-04-23

Applicant: Cheng-Sheng Tsung

Inventor： Cheng-Sheng Tsung ,  Shih-Hao Chuang

IPC: G02B26/00 ,  G02F1/00 ,  H01L51/56 ,  H01L33/60 ,  H01L33/44 ,  B81C1/00 ,  G02B5/00 ,  G01N21/01

CPC classification number: H01L33/44 ,  B81C1/00031 ,  B81C2201/0149 ,  G01N21/01 ,  G01N2201/02 ,  G02B5/008 ,  H01L33/60 ,  H01L2933/0058

Abstract: A method for fabricating a microstructure to generate surface plasmon waves comprises steps of: preparing a substrate, and using a carrier material to carry a plurality of metallic nanoparticles and letting the metallic nanoparticles undertake self-assembly to form a microstructure on the substrate, wherein the metallic nanoparticles are separated from each other or partially agglomerated to allow the microstructure to be formed with a discontinuous surface. The present invention fabricates the microstructure having the discontinuous surface by a self-assembly method to generate the surface plasmon waves, thus exempts from using the expensive chemical vapor deposition (CVD) technology and is able to reduce the time and cost of fabrication. The present invention also breaks the structural limitation on generation of surface plasmon waves to enhance the effect of generating the surface plasmon waves.

公开(公告)号：US09450154B2

公开(公告)日：2016-09-20

申请号：US14244460

申请日：2014-04-03

Applicant: Cheng-Sheng Tsung

Inventor： Cheng-Sheng Tsung ,  Shih-Hao Chuang

IPC: H01L31/0216 ,  H01L29/788 ,  H01L51/52 ,  H01L51/56 ,  G02B1/10 ,  H01L33/60 ,  H01L33/44 ,  B81C1/00 ,  G02B5/00 ,  G01N21/01

CPC classification number: H01L33/44 ,  B81C1/00031 ,  B81C2201/0149 ,  G01N21/01 ,  G01N2201/02 ,  G02B5/008 ,  H01L33/60 ,  H01L2933/0058

Abstract: A method for fabricating a microstructure to generate surface plasmon waves comprises steps of: preparing a substrate, and using a carrier material to carry a plurality of metallic nanoparticles and letting the metallic nanoparticles undertake self-assembly to form a microstructure on the substrate, wherein the metallic nanoparticles are separated from each other or partially agglomerated to allow the microstructure to be formed with a discontinuous surface. The present invention fabricates the microstructure having the discontinuous surface by a self-assembly method to generate the surface plasmon waves, thus exempts from using the expensive chemical vapor deposition (CVD) technology and is able to reduce the time and cost of fabrication. The present invention also breaks the structural limitation on generation of surface plasmon waves to enhance the effect of generating the surface plasmon waves.

Abstract translation: 用于制造微结构以产生表面等离子体激元波的方法包括以下步骤：制备基底，并使用载体材料携带多个金属纳米颗粒并使金属纳米粒子进行自组装以在基底上形成微结构，其中 金属纳米颗粒彼此分离或部分团聚以允许微结构形成不连续表面。 本发明通过自组装方法制造具有不连续表面的微结构以产生表面等离子体波，从而免除使用昂贵的化学气相沉积（CVD）技术，并且能够减少制造的时间和成本。 本发明还破坏了表面等离子体激元波的产生的结构限制，以增强产生表面等离子体波的效果。

公开(公告)号：US20150099321A1

公开(公告)日：2015-04-09

申请号：US14244460

申请日：2014-04-03

Applicant: Cheng-Sheng Tsung

Inventor： Cheng-Sheng Tsung ,  Shih-Hao Chuang

IPC: H01L33/60

CPC classification number: H01L33/44 ,  B81C1/00031 ,  B81C2201/0149 ,  G01N21/01 ,  G01N2201/02 ,  G02B5/008 ,  H01L33/60 ,  H01L2933/0058

Abstract: A method for fabricating a microstructure to generate surface plasmon waves comprises steps of: preparing a substrate, and using a carrier material to carry a plurality of metallic nanoparticles and letting the metallic nanoparticles undertake self-assembly to form a microstructure on the substrate, wherein the metallic nanoparticles are separated from each other or partially agglomerated to allow the microstructure to be formed with a discontinuous surface. The present invention fabricates the microstructure having the discontinuous surface by a self-assembly method to generate the surface plasmon waves, thus exempts from using the expensive chemical vapor deposition (CVD) technology and is able to reduce the time and cost of fabrication. The present invention also breaks the structural limitation on generation of surface plasmon waves to enhance the effect of generating the surface plasmon waves.

Abstract translation: 用于制造微结构以产生表面等离子体激元波的方法包括以下步骤：制备基底，并使用载体材料携带多个金属纳米颗粒并使金属纳米粒子进行自组装以在基底上形成微结构，其中 金属纳米颗粒彼此分离或部分团聚以允许微结构形成不连续表面。 本发明通过自组装方法制造具有不连续表面的微结构以产生表面等离子体波，从而免除使用昂贵的化学气相沉积（CVD）技术，并且能够减少制造的时间和成本。 本发明还破坏了表面等离子体激元波的产生的结构限制，以增强产生表面等离子体波的效果。