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公开(公告)号:US12240011B2
公开(公告)日:2025-03-04
申请号:US17606897
申请日:2020-04-30
Applicant: DEXERIALS CORPORATION
Inventor: Takayuki Saito , Masahiro Nishimoto , Ikuo Mitsushima , Masaki Kaneko
Abstract: A sliding device configured to perform a sliding process on a surface of an object to be slid includes a sliding part including sliding bodies each having a flat working surface; a first driving mechanism configured to regularly move the sliding bodies in parallel with the working surfaces of the sliding bodies; and a second driving mechanism configured to regularly move the sliding part in parallel with the working surfaces in a direction different from a moving direction by the first driving mechanism while the first driving mechanism moves the sliding bodies. This enables uniform supply of the sliding process material onto the surface of the object to be slid or clean the surface of the object to be slid.