公开(公告)号：US20240019299A1

公开(公告)日：2024-01-18

申请号：US18353225

申请日：2023-07-17

Applicant: Dymax Corporation

Inventor： Stephen P. Simonin ,  Walter Lin ,  William Anderson ,  David Barkus

IPC: G01J1/42 ,  G01J1/04 ,  G01J1/44

CPC classification number: G01J1/429 ,  G01J1/0414 ,  G01J1/44 ,  G01J2001/444

Abstract: According to an aspect, a UV radiometer is provided. The UV radiometer includes a sensor assembly and a sensor controller. The sensor assembly includes a UV sensor element and a temperature sensing component configured to perform a thermal adjustment of a sensed UV input from the UV sensor element to produce a compensated UV signal. The sensor controller includes a signal conditioning circuit configured to receive the compensated UV signal from the sensor assembly and produce a conditioned and compensated UV signal. The sensor controller also includes a communication interface configured to transmit the conditioned and compensated UV signal to a UV process controller.