公开(公告)号：US20200011482A1

公开(公告)日：2020-01-09

申请号：US16577711

申请日：2019-09-20

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. SWEENEY ,  Edward Edmiston JONES ,  Joseph Robert DESPRES ,  Richard S. RAY ,  Peter C. Van Buskirk ,  Edward A. STURM ,  Christopher SCANNELL

IPC: F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/06 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US20180023765A1

公开(公告)日：2018-01-25

申请号：US15549875

申请日：2016-02-12

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. SWEENEY ,  Edward E. JONES ,  Joseph R. SPRES ,  Richard S. RAY ,  Peter C. VAN BUSKIRK ,  Edward A. STURM ,  Chris SCANNELL

IPC: F17C13/02 ,  G06K19/06 ,  G06K19/07 ,  F17C11/00 ,  F17C13/00

CPC classification number: F17C13/026 ,  F17C11/00 ,  F17C13/003 ,  F17C13/02 ,  F17C2205/0338 ,  F17C2205/0391 ,  F17C2205/05 ,  F17C2205/054 ,  F17C2205/058 ,  F17C2250/0439 ,  F17C2270/0518 ,  G06K19/06037 ,  G06K19/0723

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US20190170302A1

公开(公告)日：2019-06-06

申请号：US16271339

申请日：2019-02-08

Applicant: ENTEGRIS, INC.

Inventor： Joseph D. SWEENEY ,  Edward Edmiston JONES ,  Joseph Robert DESPRES ,  Richard S. RAY ,  Peter C. Van Buskirk ,  Edward A. STURM ,  Christopher SCANNELL

IPC: F17C13/02 ,  F17C11/00 ,  F17C13/00 ,  G06K19/06 ,  G06K19/07

Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.

公开(公告)号：US20180149315A1

公开(公告)日：2018-05-31

申请号：US15574617

申请日：2016-05-16

Applicant: ENTEGRIS, INC.

Inventor： Joseph R. DESPRES ,  Barry Lewis CHAMBERS ,  Joseph D. Sweeney ,  Richard S. RAY ,  Steven E. BISHOP

IPC: F17C7/00 ,  H01L21/67 ,  F17C11/00 ,  F17C13/00

CPC classification number: F17C7/00 ,  F17C11/00 ,  F17C13/00 ,  F17C13/025 ,  F17C13/026 ,  F17C13/084 ,  F17C2205/0107 ,  F17C2205/0142 ,  F17C2205/0176 ,  F17C2221/03 ,  F17C2223/0123 ,  F17C2225/0123 ,  F17C2227/0107 ,  F17C2227/042 ,  F17C2250/032 ,  F17C2250/043 ,  F17C2250/0439 ,  F17C2250/0443 ,  F17C2250/0447 ,  F17C2250/0626 ,  F17C2250/0631 ,  F17C2270/0518 ,  H01L21/67 ,  H01L21/67017

Abstract: Gas supply systems and methods are described for delivery of gas to gas-utilizing process tools, e.g., gas-utilizing tools for manufacturing of semiconductor products, flat-panel displays, solar panels, etc. The gas supply systems may comprise gas cabinets that are arranged with adsorbent-based and/or interiorly pressure-regulated gas supply vessels therein, and a gas mixing manifold is described, which may be disposed in the gas cabinet or operated in a standalone fashion. In one aspect, gas supply systems are described in which vessels susceptible to cooling involving diminution of gas supply pressure are processed after pressure-controlled termination of dispensing operation, for dispensing operation achieving utilization of gas remaining in the vessel after such termination.