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公开(公告)号：US20200011482A1
公开(公告)日：2020-01-09
申请号：US16577711
申请日：2019-09-20
Applicant: ENTEGRIS, INC.
Inventor： Joseph D. SWEENEY , Edward Edmiston JONES , Joseph Robert DESPRES , Richard S. RAY , Peter C. Van Buskirk , Edward A. STURM , Christopher SCANNELL
Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.
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Patent Agency Ranking
公开(公告)号：US20190170302A1
公开(公告)日：2019-06-06
申请号：US16271339
申请日：2019-02-08
Applicant: ENTEGRIS, INC.
Inventor： Joseph D. SWEENEY , Edward Edmiston JONES , Joseph Robert DESPRES , Richard S. RAY , Peter C. Van Buskirk , Edward A. STURM , Christopher SCANNELL
Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.
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公开(公告)号：US20200088352A1
公开(公告)日：2020-03-19
申请号：US16375000
申请日：2019-04-04
Applicant: ENTEGRIS, INC.
Inventor： Joseph Robert DESPRES , Joseph D. SWEENEY , Edward A. STURM
Abstract: Described are storage and dispensing vessels and related systems and methods, for dispensing reagent gas from a vessel in which the reagent gas is held in sorptive relationship to a solid adsorbent medium, the reagent gas being contained at super-atmospheric pressure and the solid adsorbent medium comprising a metal-organic framework.
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4.发明申请公开(公告)号：US20220128196A1
公开(公告)日：2022-04-28
申请号：US17505735
申请日：2021-10-20
Applicant: ENTEGRIS, INC.
Inventor： Joseph R. DESPRES , Joseph SWEENEY , Edward A. STURM
Abstract: Described are storage and dispensing systems and related methods, for the storage and selective dispensing germane a reagent gas from a vessel in which the reagent gas is held in sorptive relationship to a solid adsorbent medium at an interior of a storage vessel and wherein the methods and dispensing systems provide dispensing of the reagent gas from the storage vessel with a reduced level of atmospheric impurities contained in the dispensed reagent gas.
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公开(公告)号：US20180221851A1
公开(公告)日：2018-08-09
申请号：US15506158
申请日：2015-08-22
Applicant: ENTEGRIS, INC.
Inventor： Melissa A. PETRUSKA , Edward A. STURM , Shaun M. WILSON
CPC classification number: B01J20/20 , B01D53/02 , B01D2253/102 , B01D2253/342 , B01J20/28011 , B01J20/28016 , B01J20/28042 , B01J20/28057 , B01J20/28064 , B01J20/2808 , B01J20/28092 , B01J20/3078 , B01J20/3085 , B01J2220/4825 , B01J2220/4831 , B01J2220/4837 , B01J2220/485 , B01J2220/4875 , C01B32/05 , C01B32/318 , C01B32/324 , C01B32/366 , C01P2006/10 , C01P2006/12 , F17C11/00 , F17C11/002 , F17C11/005 , F17C11/007 , F17C2270/0168 , F17C2270/0518 , H01G11/24 , H01G11/34 , Y02C10/08
Abstract: A carbon pyrolyzate material is disclosed, having utility as an adsorbent as well as for energy storage and other applications. The pyrolyzate material comprises microporous carbon derived from low cost naturally-occurring carbohydrate source material such as polysaccharides. In adsorbent applications, the carbon pyrolyzate may for example be produced in a particulate form or a monolithic form, having high density and high pore volume to maximize gas storage and delivery, with the pore size distribution of the carbon pyrolyzate adsorbent being tunable via activation conditions to optimize storage capacity and delivery for specific gases of interest.
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公开(公告)号：US20180023765A1
公开(公告)日：2018-01-25
申请号：US15549875
申请日：2016-02-12
Applicant: ENTEGRIS, INC.
Inventor： Joseph D. SWEENEY , Edward E. JONES , Joseph R. SPRES , Richard S. RAY , Peter C. VAN BUSKIRK , Edward A. STURM , Chris SCANNELL
CPC classification number: F17C13/026 , F17C11/00 , F17C13/003 , F17C13/02 , F17C2205/0338 , F17C2205/0391 , F17C2205/05 , F17C2205/054 , F17C2205/058 , F17C2250/0439 , F17C2270/0518 , G06K19/06037 , G06K19/0723
Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.
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