公开(公告)号：US10648587B2

公开(公告)日：2020-05-12

申请号：US16079709

申请日：2017-03-31

Applicant: ENTEGRIS, Inc.

Inventor： Iraj Gashgaee ,  George Gonnella ,  Bruce Garber

IPC: F16K31/126 ,  F16K31/122 ,  F16K7/17 ,  F16K47/00

Abstract: A fluid valve incorporates a plunger with a fluid channel. The plunger is connected to a boss coupled to a diaphragm, this boss also includes a fluid channel and the plunger and boss fluid channels are in fluid communication. The boss fluid channel opens to the backside of the diaphragm in the valve cavity and permits substantially complete pressurization or evacuation of the volume behind the diaphragm in the valve. The substantially complete pressurization of the volume behind the diaphragm enables full closure of the diaphragm and improves contact of the diaphragm with the valve seat thereby improving performance of the valve.

公开(公告)号：US20190056041A1

公开(公告)日：2019-02-21

申请号：US16079709

申请日：2017-03-31

Applicant: ENTEGRIS, Inc.

Inventor： Iraj Gashgaee ,  George Gonnella ,  Bruce Garber

IPC: F16K31/126 ,  F16K7/17 ,  F16K31/122

Abstract: A fluid valve (700) is disclosed that incorporates a plunger (760) with a fluid channel (766). The plunger is connected to a (724) boss coupled to a diaphragm 720), this boss also includes a fluid channel (726) and the plunger and boss fluid channels are in fluid communication. The boss fluid channel opens to the backside of the diaphragm in the valve cavity (780) and permits substantially complete pressurization or evacuation of the volume behind the diaphragm in the valve. The substantially complete pressurization of the volume behind the diaphragm enables full closure of the diaphragm and improves contact of the diaphragm with the valve seat (712) thereby improving performance of the valve.