公开(公告)号：US09576775B2

公开(公告)日：2017-02-21

申请号：US14532894

申请日：2014-11-04

Applicant: relyon plasma GmbH ,  EPCOS AG

Inventor： Stefan Nettesheim ,  Georg Kuegerl ,  Markus Puff

IPC: B01J19/08 ,  H01J37/32 ,  H05H1/36 ,  H05H1/44

CPC classification number: H01J37/32449 ,  H01J37/32899 ,  H05H1/36 ,  H05H1/44

Abstract: The invention relates to a plasma generation device comprising a plurality of plasma modules for generating a plasma. Each plasma module has a module housing with at least one gas inlet for supplying a process gas. Furthermore, a discharge device for generating the plasma from the process gas and a plasma outlet are provided. The plasma generation device has at least two plasma modules for generating a plasma. Each plasma module has at least one gas outlet for some of the process gas, wherein the at least one gas outlet of at least one plasma module issues into a respective gas inlet of another plasma module.

Abstract translation: 本发明涉及一种等离子体产生装置，其包括用于产生等离子体的多个等离子体模块。 每个等离子体模块具有模块壳体，其具有至少一个气体入口用于提供处理气体。 此外，提供了用于从处理气体产生等离子体的排出装置和等离子体出口。 等离子体产生装置具有用于产生等离子体的至少两个等离子体模块。 每个等离子体模块具有用于一些工艺气体的至少一个气体出口，其中至少一个等离子体模块的至少一个气体出口发射到另一个等离子体模块的相应气体入口。

公开(公告)号：US20150243880A1

公开(公告)日：2015-08-27

申请号：US14706728

申请日：2015-05-07

Applicant: EPCOS AG

Inventor： Franz Rinner ,  Dieter Somitsch ,  Jan-Thorsten Reszat ,  Reinhard Gabl ,  Martin Galler ,  Christoph Auer ,  Georg Kuegerl

IPC: H01L41/313 ,  H01L41/311 ,  C23C4/08 ,  H01L41/293 ,  C23C4/12 ,  C23C4/02

CPC classification number: H01L41/313 ,  C23C4/02 ,  C23C4/08 ,  C23C4/12 ,  C23C4/129 ,  C23C4/131 ,  C23C4/134 ,  H01L41/0472 ,  H01L41/083 ,  H01L41/29 ,  H01L41/293 ,  H01L41/311 ,  Y10T29/42 ,  Y10T156/10

Abstract: A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.

Abstract translation: 多层设计的压电致动器包括借助于通过热喷涂施加的粘结层而被固定的外部电极。 例如，外部电极形成为编织线织物。 此外，规定了用于紧固压电致动器中的外部电极的方法。

公开(公告)号：US20180169287A1

公开(公告)日：2018-06-21

申请号：US15894153

申请日：2018-02-12

Applicant: Relyon Plasma GmbH ,  EPCOS AG

Inventor： Stefan Nettesheim ,  Dominik Burger ,  Georg Kuegerl ,  Markus Puff

IPC: A61L9/12 ,  A61L9/22 ,  A61L9/04 ,  B01D53/66

CPC classification number: A61L9/122 ,  A61L9/015 ,  A61L9/046 ,  A61L9/22 ,  A61L2209/132 ,  A61L2209/14 ,  A61L2209/16 ,  A61L2209/212 ,  A61L2209/22 ,  B01D53/66 ,  B60H3/0078 ,  B60H3/0092 ,  F24F3/16 ,  F24F2003/1685 ,  H05H1/2475 ,  H05H2001/2481

Abstract: The invention relates to an air-conditioning device for a space to be air-conditioned. The air-conditioning device has a housing including an air supply and an air discharge. In the housing, a flow path is formed between the air supply and the air discharge. In the flow path, at least one heat exchanger, a blower, and a means for generating an excited gas are provided. Furthermore, a surface coating is provided in the flow path, which is configured for the catalytic decomposition of the ozone content of the excited gas, and which is arranged downstream of the means for generating the excited gas.

公开(公告)号：US09788404B2

公开(公告)日：2017-10-10

申请号：US14806241

申请日：2015-07-22

Applicant: relyon plasma GmbH ,  EPCOS AG

Inventor： Stefan Nettesheim ,  Dariusz Korzec ,  Dominik Burger ,  Georg Kuegerl ,  Markus Puff ,  Florian Hoppenthaler

IPC: H05H1/24 ,  H01L41/053 ,  H01L41/107

CPC classification number: H05H1/24 ,  H01L41/053 ,  H01L41/107 ,  H05H2001/2481 ,  H05H2240/10 ,  H05H2245/123

Abstract: An apparatus for producing a plasma including a control circuit which is electrically connected to a piezoelectric transformer in order to excite the piezoelectric transformer. A hand-held device that uses the apparatus. The piezoelectric transformer is constructed of several layers. The control circuit is implemented on a circuit board, and the piezoelectric transformer is held over the circuit board by means of a region of a first end. A high voltage is applied to a second free end of the piezoelectric transformer. The plasma is produced at atmospheric pressure.

公开(公告)号：US09825215B2

公开(公告)日：2017-11-21

申请号：US14706728

申请日：2015-05-07

Applicant: EPCOS AG

Inventor： Franz Rinner ,  Dieter Somitsch ,  Jan-Thorsten Reszat ,  Reinhard Gabl ,  Martin Galler ,  Christoph Auer ,  Georg Kuegerl

IPC: H04R17/00 ,  H01L41/313 ,  H01L41/29 ,  H01L41/047 ,  C23C4/02 ,  C23C4/08 ,  C23C4/12 ,  H01L41/293 ,  H01L41/311 ,  C23C4/131 ,  C23C4/129 ,  C23C4/134 ,  H01L41/083

CPC classification number: H01L41/313 ,  C23C4/02 ,  C23C4/08 ,  C23C4/12 ,  C23C4/129 ,  C23C4/131 ,  C23C4/134 ,  H01L41/0472 ,  H01L41/083 ,  H01L41/29 ,  H01L41/293 ,  H01L41/311 ,  Y10T29/42 ,  Y10T156/10

Abstract: A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.