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公开(公告)号:US20160345106A1
公开(公告)日:2016-11-24
申请号:US15111224
申请日:2014-12-04
Applicant: EPCOS AG
Inventor: Wolfgang Pahl , Gregor Feiertag
CPC classification number: H04R19/04 , B81B7/0061 , B81B2201/0257 , B81B2207/012 , B81B2207/07 , H01L2224/16225 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/48465 , H01L2224/73204 , H01L2924/10158 , H01L2924/15192 , H01L2924/16153 , H04R1/04 , H04R1/406 , H04R5/027 , H04R19/005 , H04R2201/003 , H04R2410/03 , H01L2924/00014 , H01L2924/00
Abstract: A multi-MEMS module is specified which can be produced expediently and enables a smaller design. The module comprises a housing having an interior and a first and a second opening, a first MEMS chip and a second MEMS chip. The first MEMS chip is acoustically coupled to the first opening. The second MEMS chip is acoustically coupled to the second opening.
Abstract translation: 指定了可以方便生产并实现更小设计的多MEMS模块。 模块包括具有内部和第一和第二开口的壳体,第一MEMS芯片和第二MEMS芯片。 第一个MEMS芯片声耦合到第一个开口。 第二MEMS芯片声耦合到第二开口。
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公开(公告)号:US10015600B2
公开(公告)日:2018-07-03
申请号:US15111224
申请日:2014-12-04
Applicant: Epcos AG
Inventor: Wolfgang Pahl , Gregor Feiertag
CPC classification number: H04R19/04 , B81B7/0061 , B81B2201/0257 , B81B2207/012 , B81B2207/07 , H01L2224/16225 , H01L2224/32225 , H01L2224/48091 , H01L2224/48227 , H01L2224/48465 , H01L2224/73204 , H01L2924/10158 , H01L2924/15192 , H01L2924/16153 , H04R1/04 , H04R1/406 , H04R5/027 , H04R19/005 , H04R2201/003 , H04R2410/03 , H01L2924/00014 , H01L2924/00
Abstract: A multi-MEMS module is specified which can be produced expediently and enables a smaller design. The module comprises a housing having an interior and a first and a second opening, a first MEMS chip and a second MEMS chip. The first MEMS chip is acoustically coupled to the first opening. The second MEMS chip is acoustically coupled to the second opening.
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