公开(公告)号：US20190252166A1

公开(公告)日：2019-08-15

申请号：US16341991

申请日：2017-10-03

Applicant: EVATEC AG

Inventor： Heinz Felzer ,  Dominik Jager ,  Michael Cheseaux ,  Hartmut Rohrmann

IPC: H01J37/34 ,  C23C14/08 ,  C23C14/35

CPC classification number: H01J37/3408 ,  C23C14/0068 ,  C23C14/08 ,  C23C14/086 ,  C23C14/352 ,  H01J37/3405 ,  H01J37/3417 ,  H01J37/3426 ,  H01J37/3438 ,  H01J37/3447 ,  H01J37/3452 ,  H01J37/3464 ,  H01J37/3473 ,  H01J2237/20214 ,  H01J2237/332

Abstract: A sputtering source includes two facing plate shaped targets and a magnet arrangement along each of the targets. An open coating outlet area from the reaction space between the targets is limited by facing rims of the two plate shaped targets. Catcher plates along each of the rims respectively project in a direction from the rims towards each other into the open coating outlet area, thereby restricting the open coating outlet area as limited by the mutually facing rims of the two plate shaped targets.

公开(公告)号：US20180245212A1

公开(公告)日：2018-08-30

申请号：US15758459

申请日：2016-09-05

Applicant: Evatec AG

Inventor： Silvia Schwyn-Thony ,  Romeo Good ,  Michael Cheseaux ,  Marco Padrun

IPC: C23C14/35 ,  C23C14/50 ,  H01J37/32 ,  H01J37/34

CPC classification number: C23C14/35 ,  C23C14/505 ,  H01J37/32715 ,  H01J37/32779 ,  H01J37/3408 ,  H01J37/3423 ,  H01J37/3452

Abstract: A vacuum treatment apparatus includes a vacuum treatment recipient with a circular opening between an inside and exterior of the recipient. The recipient houses a turntable, which defines a plane (P) along its table surface, is drivingly rotatable around a central axis perpendicular to plane (P), and exhibits a plurality of circular substrates supports. The opening is arranged such that during a turn of the turntable the area of each of the substrate supports and the opening are fully aligned and completely face each other. The vacuum treatment apparatus also includes a PVD deposition source attached to the opening. The PVD source has a a circular material target and a static magnet arrangement. The magnet arrangement is arranged in a plane (M) in parallel to plane (P) and is not rotationally symmetric around a central axis running centrally through the magnet arrangement and being perpendicular to the plane (M).

公开(公告)号：US10889890B2

公开(公告)日：2021-01-12

申请号：US15758459

申请日：2016-09-05

Applicant: Evatec AG

Inventor： Silvia Schwyn-Thony ,  Romeo Good ,  Michael Cheseaux ,  Marco Padrun

IPC: C23C14/35 ,  C23C14/50 ,  H01J37/34 ,  H01J37/32

Abstract: A vacuum treatment apparatus includes a vacuum treatment recipient with a circular opening between an inside and exterior of the recipient. The recipient houses a turntable, which defines a plane (P) along its table surface, is drivingly rotatable around a central axis perpendicular to plane (P), and exhibits a plurality of circular substrates supports. The opening is arranged such that during a turn of the turntable the area of each of the substrate supports and the opening are fully aligned and completely face each other. The vacuum treatment apparatus also includes a PVD deposition source attached to the opening. The PVD source has a a circular material target and a static magnet arrangement. The magnet arrangement is arranged in a plane (M) in parallel to plane (P) and is not rotationally symmetric around a central axis running centrally through the magnet arrangement and being perpendicular to the plane (M).