Abstract:
A Raman multi-gas detection system including an enhancement unit coupled between a light source and a detector. The enhancement unit includes a nanongrid having a plurality of nanogaps. A gas is coupled to the enhancement unit and is configured to flow through the plurality of nanogaps of the nanogrid. The nanogrid comprises one or more plasmon-active materials. The light source is configured to generate plasmon-enhanced electric fields in the plurality of nanogaps of the nanogrid to induce enhanced Raman scattering of the constituent molecules in the gas within the plurality of nanogaps such that a plurality of different constituent molecules in the gas can be detected. In one embodiment, a molecule in the gas is configured to scatter the light from the light source at a rate more than 1000 times greater than in the free space in the enhancement unit.
Abstract:
A Raman multi-gas detection system including an enhancement unit coupled between a light source and a detector. The enhancement unit includes a nanogrid having a plurality of nanogaps. A gas is coupled to the enhancement unit and is configured to flow through the plurality of nanogaps of the nanogrid. The nanogrid comprises one or more plasmon-active materials. The light source is configured to generate plasmon-enhanced electric fields in the plurality of nanogaps of the nanogrid to induce enhanced Raman scattering of the constituent molecules in the gas within the plurality of nanogaps such that a plurality of different constituent molecules in the gas can be detected. In one embodiment, a molecule in the gas is configured to scatter the light from the light source at a rate more than 10000 times greater than in the free space in the enhancement unit.
Abstract:
A Raman multi-gas detection system including an enhancement unit coupled between a light source and a detector. The enhancement unit includes a nanongrid having a plurality of nanogaps. A gas is coupled to the enhancement unit and is configured to flow through the plurality of nanogaps of the nanogrid. The nanogrid comprises one or more plasmon-active materials. The light source is configured to generate plasmon-enhanced electric fields in the plurality of nanogaps of the nanogrid to induce enhanced Raman scattering of the constituent molecules in the gas within the plurality of nanogaps such that a plurality of different constituent molecules in the gas can be detected. In one embodiment, a molecule in the gas is configured to scatter the light from the light source at a rate more than 1000 times greater than in the free space in the enhancement unit.
Abstract:
A method for manufacturing a single crystal nano-structure includes providing a device layer with a 100 structure on a substrate; providing a stress layer onto the device layer; patterning the stress layer along the 110 direction of the device layer; selectively removing parts of the stress layer to obtain exposed parts of the device layer; plane dependent etching of the exposed parts of the device layer to obtain an exposed 111 faces of the device layer; thermally oxidizing the exposed 111 face of the device layer and forming a lateral oxidation layer at an interface of the device layer and the stress layer; providing a mask layer onto the oxidized exposed 111 face of the device layer; removing remaining parts of the stress layer to obtain further exposed parts of the device layer; removing the mask layer; plane dependent etching of the further exposed parts of the device layer to form a single crystal nano-structure with a triangular shaped cross section, until a side of the triangular shaped cross section coplanar to a side of a cross section of the oxidized exposed 111 face is small in comparison with the side of the cross section of the oxidized exposed 111 face.
Abstract:
An array of movable MEMS mirror devices is provided having a high linear mirror fill factor. The array includes a base structure and selectively movable mirror structures pivotally mounted on the base structure. Each mirror structure is pivotally supported by a flexure connected to the base structure. The mirror structures each include a reflective surface portion, which is arranged in close proximity to the reflective surface portions of other mirror structures and in a generally linear alignment, forming a row structure. The flexures supporting adjacent mirror structures are staggered on opposite sides of the row structure.