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公开(公告)号：US09609732B2
公开(公告)日：2017-03-28
申请号：US14867159
申请日：2015-09-28
Applicant: Energetiq Technology, Inc.
Inventor： Donald K. Smith
IPC: G02B5/00 , H05G2/00 , B82Y10/00 , G03F7/20 , H01J61/16 , H01J65/04 , H05B41/38 , G21K5/00 , G21K5/04
CPC classification number: H05G2/008 , B82Y10/00 , G03F7/70033 , G21K5/00 , G21K5/04 , H01J61/16 , H01J65/04 , H05B41/382 , H05G2/001 , H05G2/003 , H05G2/005 , Y02B20/204 , Y10T29/49002
Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
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公开(公告)号：US20240196506A1
公开(公告)日：2024-06-13
申请号：US18077443
申请日：2022-12-08
Applicant: Hamamatsu Photonics K.K. , Energetiq Technology, Inc.
Inventor： Frederick Marvin Niell, III , Donald K. Smith , Matthew M. Besen , Stephen F. Horne , David B. Reisman , Daniel J. Arcaro , Michael J. Roderick
IPC: H05H1/10
CPC classification number: H05H1/10
Abstract: A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.
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公开(公告)号：US20150289353A1
公开(公告)日：2015-10-08
申请号：US14448258
申请日：2014-07-31
Applicant: Energetiq Technology, Inc.
Inventor： Donald K. Smith
IPC: H05G2/00
CPC classification number: H05G2/008 , B82Y10/00 , G03F7/70033 , G21K5/00 , G21K5/04 , H01J61/16 , H01J65/04 , H05B41/382 , H05G2/001 , H05G2/003 , H05G2/005 , Y02B20/204 , Y10T29/49002
Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
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4.发明授权Light source for generating light from a laser sustained plasma in a above-atmospheric pressure chamber 有权用于在上述大气压力室内从激光持续等离子体产生光的光源公开(公告)号：US08969841B2
公开(公告)日：2015-03-03
申请号：US14510959
申请日：2014-10-09
Applicant: Energetiq Technology, Inc.
Inventor： Donald K. Smith
CPC classification number: H05G2/008 , B82Y10/00 , G03F7/70033 , G21K5/00 , G21K5/04 , H01J61/16 , H01J65/04 , H05B41/382 , H05G2/001 , H05G2/003 , H05G2/005 , Y02B20/204 , Y10T29/49002
Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。
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公开(公告)号：US20150021500A1
公开(公告)日：2015-01-22
申请号：US14510959
申请日：2014-10-09
Applicant: Energetiq Technology, Inc.
Inventor： Donald K. Smith
IPC: G21K5/04
CPC classification number: H05G2/008 , B82Y10/00 , G03F7/70033 , G21K5/00 , G21K5/04 , H01J61/16 , H01J65/04 , H05B41/382 , H05G2/001 , H05G2/003 , H05G2/005 , Y02B20/204 , Y10T29/49002
Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。
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Patent Agency Ranking
公开(公告)号：US20250056705A1
公开(公告)日：2025-02-13
申请号：US18928527
申请日：2024-10-28
Applicant: Hamamatsu Photonics K.K. , Energetiq Technology, Inc.
Inventor： Frederick Marvin Niell, III , Donald K. Smith , Matthew M. Besen , Stephen F. Horne , David B. Reisman , Daniel J. Arcaro , Michael J. Roderick
IPC: H05H1/10
Abstract: A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.
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公开(公告)号：US09048000B2
公开(公告)日：2015-06-02
申请号：US13964938
申请日：2013-08-12
Applicant: Energetiq Technology, Inc.
Inventor： Donald K. Smith
IPC: G01J1/00 , G21K5/04 , B82Y10/00 , G03F7/20 , H01J61/16 , H01J65/04 , H05B41/38 , H05G2/00 , G21K5/00
CPC classification number: H05G2/008 , B82Y10/00 , G03F7/70033 , G21K5/00 , G21K5/04 , H01J61/16 , H01J65/04 , H05B41/382 , H05G2/001 , H05G2/003 , H05G2/005 , Y02B20/204 , Y10T29/49002
Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。
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公开(公告)号：US20140117258A1
公开(公告)日：2014-05-01
申请号：US13964938
申请日：2013-08-12
Applicant: Energetiq Technology, Inc.
Inventor： Donald K. Smith
CPC classification number: H05G2/008 , B82Y10/00 , G03F7/70033 , G21K5/00 , G21K5/04 , H01J61/16 , H01J65/04 , H05B41/382 , H05G2/001 , H05G2/003 , H05G2/005 , Y02B20/204 , Y10T29/49002
Abstract: An apparatus for producing light includes a chamber and an ignition source that ionizes a gas within the chamber. The apparatus also includes at least one laser that provides energy to the ionized gas within the chamber to produce a high brightness light. The laser can provide a substantially continuous amount of energy to the ionized gas to generate a substantially continuous high brightness light.
Abstract translation: 一种用于制造光的装置包括一个室和一个使室内的气体电离的点火源。 该装置还包括至少一个激光器，其向室内的电离气体提供能量以产生高亮度光。 激光器可以向电离气体提供基本连续的能量以产生基本连续的高亮度光。
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公开(公告)号：US20250081319A1
公开(公告)日：2025-03-06
申请号：US18586458
申请日：2024-02-24
Applicant: Hamamatsu Photonics K.K. , Energetiq Technology, Inc.
Inventor： Frederick Marvin Niell, III , David B. Reisman , Daniel J. Arcaro , Donald K. Smith , Michael J. Roderick
Abstract: An EUV light source includes a chamber that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma generation region so that the plasma converges in the plasma confinement region. A power delivery section is positioned around the magnetic core. A power supply includes a charging circuit, a pre-ionization circuit, and a solid state switching circuit having an output coupled to the magnetic core. The power supply is configured to isolate the charging circuit from the power delivery section and to generate a pre-ionization pulse through inductive coupling that causes ionization of gas in the plasma generation region. The solid state switching circuit is configured to discharge a capacitance through inductive coupling to form a plasma in the plasma generation region.
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公开(公告)号：US12156322B2
公开(公告)日：2024-11-26
申请号：US18077443
申请日：2022-12-08
Applicant: Hamamatsu Photonics K.K. , Energetiq Technology, Inc.
Inventor： Frederick Marvin Niell, III , Donald K. Smith , Matthew M. Besen , Stephen F. Horne , David B. Reisman , Daniel J. Arcaro , Michael J. Roderick
Abstract: A method and apparatus for generating light includes a chamber having a high voltage region, a low voltage region, and a plasma generation region that defines a plasma confinement region. A magnetic core is positioned around the chamber and is configured to generate a plasma in the plasma confinement region. A switched power supply includes a DC power supply and a switched resonant charging circuit that together generate a plurality of voltage pulses at the output causing a plurality of current pulses to be applied to the power delivery section around the magnetic core so that at least one plasma loop is established around the magnetic core that confines plasma in the plasma confinement region, thereby forming a magnetically confined Z-pinch plasma. Light generated by the Z-pinch plasma propagates out of a port in the light source.
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