公开(公告)号：US20210202205A1

公开(公告)日：2021-07-01

申请号：US16730998

申请日：2019-12-30

Applicant: FEI Company

Inventor： John J. FLANAGAN ,  Nathaniel KURTZ ,  Ashley TILSON ,  Phillip PARKER

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/22 ,  G01N23/20058

Abstract: Automatic alignment of the zone axis of a sample and a charged particle beam is achieved based on a diffraction pattern of the sample. An area corresponding to the Laue circle is segmented using a trained network. The sample is aligned with the charged particle beam by tilting the sample with a zone axis tilt determined based on the segmented area.

公开(公告)号：US20220076917A1

公开(公告)日：2022-03-10

申请号：US17530288

申请日：2021-11-18

Applicant: FEI Company

Inventor： John J. FLANAGAN ,  Nathaniel KURTZ ,  Ashley TILSON ,  Phillip PARKER

IPC: H01J37/244 ,  H01J37/28 ,  G01N23/20058 ,  H01J37/22

Abstract: Automatic alignment of the zone axis of a sample and a charged particle beam is achieved based on a diffraction pattern of the sample. An area corresponding to the Laue circle is segmented using a trained network. The sample is aligned with the charged particle beam by tilting the sample with a zone axis tilt determined based on the segmented area.