公开(公告)号：US11152189B2

公开(公告)日：2021-10-19

申请号：US16823140

申请日：2020-03-18

Applicant: FEI Company

Inventor： James Bishop ,  Daniel Totonjian ,  Chris Elbadawi ,  Charlene Lobo ,  Milos Toth

IPC: H01J37/244 ,  H01J37/28

Abstract: Various methods and systems are provided for imaging a sample under low vacuum with a charged particle beam. A magnetic field is provided in a detection area of the detector. Gas and plasma are provided in the detection area while detecting charged particles emitted from the sample. Sample image is formed based on the detected charged particles.

公开(公告)号：US20240418660A1

公开(公告)日：2024-12-19

申请号：US18797255

申请日：2024-08-07

Applicant: FEI COMPANY

Inventor： Daniel Totonjian ,  Aurelien Philippe Jean Maclou Botman ,  Milos Toth

IPC: G01N23/2206 ,  G01N23/203 ,  G01N23/2252 ,  G01N23/2257

Abstract: An apparatus comprises: a focused ion beam (FIB) column within a vacuum chamber configured to direct ions comprising a mixture of protons and non-hydrogen ions onto a sample, wherein the kinetic energy of ions of the mixture is not greater than 50 kilo-electron-Volts (keV); and an X-ray detector configured to detect and measure X-rays that are emitted from the sample in response to the impingement of the protons and non-hydrogen ions onto the sample. The apparatus may further comprise an electron microscope column within the vacuum chamber configured to direct and focus a beam of electrons onto the sample and to detect secondary electrons or backscattered electrons that are emitted from the sample in response to the impingement of the beam of electrons onto the sample. The electron microscope may generate an image of a sample area that is milled by the FIB column.

公开(公告)号：US12061159B2

公开(公告)日：2024-08-13

申请号：US17728869

申请日：2022-04-25

Applicant: FEI COMPANY

Inventor： Daniel Totonjian ,  Aurelien Philippe Jean Maclou Botman ,  Milos Toth

IPC: G01N23/22 ,  G01N23/20 ,  G01N23/203 ,  G01N23/2206 ,  G01N23/2252 ,  G01N23/2257

CPC classification number: G01N23/2206 ,  G01N23/203 ,  G01N23/2252 ,  G01N23/2257

Abstract: Practical implementation of Particle-Induced X-ray Emission (PIXE) on a focused ion beam apparatus or on a dual-beam apparatus comprising both focused-ion beam and scanning microscopy capabilities is described. Accordingly, an analytical method comprises: directing and focusing a beam of ions comprising a mixture of protons and non-hydrogen ions onto a sample, wherein the kinetic energy of ions of the mixture is not greater than 50 kilo-electron-Volts (keV); and detecting and measuring X-rays that are emitted from the sample in response to the impingement of the protons and non-hydrogen ions onto the sample.

公开(公告)号：US20210296086A1

公开(公告)日：2021-09-23

申请号：US16823140

申请日：2020-03-18

Applicant: FEI Company

Inventor： James Bishop ,  Daniel Totonjian ,  Chris Elbadawi ,  Charlene Lobo ,  Milos Toth

IPC: H01J37/244 ,  H01J37/28

Abstract: Various methods and systems are provided for imaging a sample under low vacuum with a charged particle beam. A magnetic field is provided in a detection area of the detector. Gas and plasma are provided in the detection area while detecting charged particles emitted from the sample. Sample image is formed based on the detected charged particles.