公开(公告)号：US20220319801A1

公开(公告)日：2022-10-06

申请号：US17709391

申请日：2022-03-30

Applicant: FEI Company

Inventor： Frantisek VASKE ,  Jakub KUBA

IPC: H01J37/20 ,  H01J37/28

Abstract: The disclosure relates to a method of preparing a sample in a charged particle microscope. The method comprises the steps of providing a sample carrier having a mechanical support contour and a grid member connected thereto. The method comprises the step of connecting said sample carrier to a mechanical stage device of the charged particle microscope. Additionally, the method comprises the step of providing a sample, for example a chunk-shaped or lamella-shaped sample and connecting said sample to the grid member of the sample carrier. The method allows, in an embodiment, easy and reliable transfer of a sample between a bulk sample and a sample carrier.