公开(公告)号：US20150380205A1

公开(公告)日：2015-12-31

申请号：US14320560

申请日：2014-06-30

Applicant: FEI Company

Inventor： N. William Parker ,  Mark Straw ,  Jorge Filevich ,  Aurelien Philippe Jean Maclou Botman ,  Steven Randolph ,  Clive Chandler ,  Mark Utlaut

IPC: H01J37/12

CPC classification number: H01J37/12 ,  H01J37/228 ,  H01J2237/006 ,  H01J2237/31749

Abstract: A method and apparatus for directing light or gas or both to a specimen positioned within about 2 mm from the lower end of a charged particle beam column The charged particle beam column assembly includes a platform defining a specimen holding position and has a set of electrostatic lenses each including a set of electrodes. The assembly includes a final electrostatic lens that includes a final electrode that is closest to the specimen holding position. This final electrode defines at least one internal passageway having a terminus that is proximal to and directed toward the specimen holding position.

Abstract translation: 一种用于将光或气体或两者引导到位于距离带电粒子束柱的下端约2mm的样本的方法和装置。带电粒子束柱组件包括限定样本保持位置并具有一组静电透镜的平台 每个包括一组电极。 组件包括最终静电透镜，其包括最靠近样品保持位置的最终电极。 该最终电极限定至少一个内部通道，其具有靠近并指向试样保持位置的终端。