公开(公告)号：US20210263430A1

公开(公告)日：2021-08-26

申请号：US17176801

申请日：2021-02-16

Applicant: FEI Company

Inventor： Umesh ADIGA

IPC: G03F7/20 ,  G06T7/00 ,  G06N7/00 ,  G06N3/04 ,  G06N20/00

Abstract: Apparatuses and methods for metrology on devices using fast marching level sets are disclosed herein. An example method at least includes initiating a fast marching level set seed on an image, propagating a fast marching level set curve from the fast marching level set seed to locate boundaries of a plurality of regions of interest within the image, and performing metrology on the regions of interest based in part on the boundaries.

公开(公告)号：US20250095159A1

公开(公告)日：2025-03-20

申请号：US18470348

申请日：2023-09-19

Applicant: FEI Company

Inventor： Umesh ADIGA ,  Derek HIGGINS ,  Mark BIEDRZYCKI ,  Melanie DOUD

IPC: G06T7/136 ,  G06T7/11 ,  H01J37/153 ,  H01J37/21 ,  H01J37/22 ,  H01J37/26

Abstract: Sample regions of interest (ROIs) for use in autofocus procedures are identified based on a gradient image of the sample. ROIs with gradient values greater that a threshold are selected, and eigenvalues of the associated image matrices are determined. ROIs with suitable variation in eigenvalues such as at least two relatively large eigenvalues are associated with high contrast features orientated in multiple directions so that such ROIs are suitable for automatic focus and astigmatism correction. Suitable ROIs can also be identified based on a histogram of gradient orientations.

公开(公告)号：US20230260085A1

公开(公告)日：2023-08-17

申请号：US17674412

申请日：2022-02-17

Applicant: FEI Company

Inventor： Umesh ADIGA

IPC: G06T3/40 ,  G06T5/20 ,  G06T5/00 ,  H01J37/22 ,  H01J37/26

CPC classification number: G06T3/4076 ,  G06T5/20 ,  G06T5/002 ,  H01J37/222 ,  H01J37/263 ,  G06T2207/20212 ,  G06T2207/20081 ,  G06T2207/10061 ,  G06T2207/20084 ,  H01J37/28

Abstract: Methods and systems for performing a hybrid machine learning method for enhancing scanning electron microscopy (SEM) images are disclosed herein. Methods include the steps of acquiring a plurality of images of a region of a sample that were each generated by irradiating the sample with a pulsed charged particle beam, upscaling each of the individual images to generate a plurality of upscaled images of the region of the sample, and combining the plurality of upscaled images to form a noise reduced image of the region of the sample.

公开(公告)号：US20200134824A1

公开(公告)日：2020-04-30

申请号：US16177034

申请日：2018-10-31

Applicant: FEI COMPANY

Inventor： Umesh ADIGA

IPC: G06T7/11 ,  G06T3/40 ,  G06T7/60 ,  G06T5/00

Abstract: Smart metrology methods and apparatuses disclosed herein process images for automatic metrology of desired features. An example method at least includes extracting a region of interest from an image, the region including one or more boundaries between different sections, enhancing at least the extracted region of interest based on one or more filters, generating a multi-scale data set of the region of interest based on the enhanced region of interest, initializing a model of the region of interest; optimizing a plurality of active contours within the enhanced region of interest based on the model of the region of interest and further based on the multi-scale data set, the optimized plurality of active contours identifying the one or more boundaries within the region of interest, and performing metrology on the region of interest based on the identified boundaries.