公开(公告)号：US11099068B2

公开(公告)日：2021-08-24

申请号：US15448701

申请日：2017-03-03

Applicant: FILMETRICS, INC.

Inventor： Scott A. Chalmers ,  Randall S. Geels ,  Matthew F. Ross

IPC: G01J3/10 ,  G01N21/45 ,  G01J3/26 ,  G01N21/25 ,  G01B11/06 ,  G01N21/84 ,  G01J3/12 ,  G01J3/28

Abstract: A system comprising a light source, and a retention device configured to receive and retain a sample for measurement. The system includes a detector. An optical path couples light between the light source, the sample when present, and the detector. An optical objective is configured to couple light from the light source to the sample when present, and couple reflected light to the detector. A controller is configured to automatically control focus and/or beam path of the light directed by the optical objective to the sample when present. The system includes a spatially variable filter (SVF) positioned in the optical path. The SVF is configured to have spectral properties that vary as a function of illuminated position on the SVF.