公开(公告)号：US08908177B2

公开(公告)日：2014-12-09

申请号：US13743038

申请日：2013-01-16

Applicant: Filmetrics, Inc.

Inventor： Scott A. Chalmers ,  Randall S. Geels

IPC: G01J3/28 ,  G01J3/10

CPC classification number: G01J3/10 ,  G01J3/28

Abstract: Embodiments described herein correct errors in spectrometer outputs due to the presence of second-order light. Embodiments determine a relationship between first-order light and second-order light of the spectrometer output. The relationship is a function of wavelength and an output of the spectrometer due to the first-order light. The relationship is used to determine an estimated contribution of the second-order light to the output. Spectrometer errors introduced by the second-order light are corrected by adjusting the spectrometer output according to the estimated contribution of the second-order light.

Abstract translation: 由于二阶光的存在，本文所述的实施例校正了光谱仪输出中的误差。 实施例确定了光谱仪输出的一阶光和二阶光之间的关系。 该关系是由于一阶光而产生的波长和光谱仪的输出的函数。 该关系用于确定二阶光对输出的估计贡献。 通过根据二阶光的估计贡献调节光谱仪输出来校正由二次光引入的光谱仪误差。

公开(公告)号：US11099068B2

公开(公告)日：2021-08-24

申请号：US15448701

申请日：2017-03-03

Applicant: FILMETRICS, INC.

Inventor： Scott A. Chalmers ,  Randall S. Geels ,  Matthew F. Ross

IPC: G01J3/10 ,  G01N21/45 ,  G01J3/26 ,  G01N21/25 ,  G01B11/06 ,  G01N21/84 ,  G01J3/12 ,  G01J3/28

Abstract: A system comprising a light source, and a retention device configured to receive and retain a sample for measurement. The system includes a detector. An optical path couples light between the light source, the sample when present, and the detector. An optical objective is configured to couple light from the light source to the sample when present, and couple reflected light to the detector. A controller is configured to automatically control focus and/or beam path of the light directed by the optical objective to the sample when present. The system includes a spatially variable filter (SVF) positioned in the optical path. The SVF is configured to have spectral properties that vary as a function of illuminated position on the SVF.