公开(公告)号：US20170276615A1

公开(公告)日：2017-09-28

申请号：US15197408

申请日：2016-06-29

Applicant: FOGALE NANOTECH

Inventor： Gilles FRESQUET ,  Alain COURTEVILLE ,  Philippe GASTALDO

IPC: G01N21/95 ,  G01B11/06 ,  G01N21/88 ,  G01B11/02

CPC classification number: G01J3/0208 ,  G01B11/022 ,  G01B11/0608 ,  G01B11/22 ,  G01B11/245 ,  G01B2210/50 ,  G01B2210/56 ,  G01J3/0218 ,  G01J3/18 ,  G01J3/453 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/063 ,  G01N2201/0833 ,  G01N2201/105 ,  G02B21/0064 ,  H01L22/12

Abstract: A method is provided for inspecting the surface of an object such as a wafer having tridimensional structures, using a confocal chromatic device with a plurality of optical measurement channels and a chromatic lens allowing optical wavelengths of a broadband light source to be focused at different axial distances defining a chromatic measurement range. The method includes a step of obtaining an intensity information corresponding to the intensity of the light actually focused on an interface of the object within the chromatic measurement range at a plurality of measurement points on the object by measuring a total intensity over the full spectrum of the light collected by at least some of the optical measurement channels in a confocal configuration.

公开(公告)号：US20210178606A1

公开(公告)日：2021-06-17

申请号：US17257170

申请日：2019-07-04

Applicant: FOGALE NANOTECH

Inventor： Yacine CHAKOUR ,  Didier ROZIERE ,  Alain COURTEVILLE

IPC: B25J13/08 ,  B25J19/00 ,  B25J19/06

Abstract: An appliance includes: at least one capacitive measurement electrode; at least one capacitive detection electronics; and an electric line, having at least one electric wire, in the detection zone; the appliance also having at least one spacer structure for distancing the electric line between: a minimum distance (Dmin) corresponding to the distance beyond which a reference electric line generates a coupling capacitance with the at least one measurement electrode, less than a predetermined threshold capacitance; and a maximum distance (Dmax) corresponding to the distance beyond which a reference object generates a coupling capacitance with the at least one measurement electrode, less than the threshold capacitance.

公开(公告)号：US20210154860A1

公开(公告)日：2021-05-27

申请号：US17256776

申请日：2019-07-04

Applicant: FOGALE NANOTECH

Inventor： Yacine CHAKOUR ,  Didier ROZIERE ,  Alain COURTEVILLE

IPC: B25J13/08 ,  G01V3/08 ,  B25J19/00 ,  H03K17/955

Abstract: An appliance includes: at least one measurement electrode, for detecting at least one object in a detection zone, by detecting a signal with respect to a coupling capacitance between the object and said the at least one measurement electrode; at least one capacitive detection electronics, connected to the at least one measurement electrode, and an electric line, having at least one electric wire, in the detection zone; the appliance also including a signal conditioner, applying to at least a portion of the electric line, an alternating electrical potential (VG), called guard potential, identical to the detection potential at the detection frequency. The appliance can be a robot, in particular a robotized arm, equipped with an electric line providing a power supply to a component part of the robot.

公开(公告)号：US20220130147A1

公开(公告)日：2022-04-28

申请号：US17310704

申请日：2020-02-10

Applicant: FOGALE NANOTECH

Inventor： Alain COURTEVILLE ,  Adrien KAISER ,  José Alonso YBANEZ ZEPEDA

IPC: G06V20/52 ,  B25J13/08 ,  G06T1/00 ,  B25J9/16 ,  G06T7/38 ,  H04N13/271 ,  H04N13/243 ,  G06T7/593

Abstract: A method for monitoring the environment of a robot including at least one iteration of a detection phase including the following steps:—acquisition, at a measurement instant, of an image of the depth of the environment, referred to as a measurement image, by the at least one 3D camera,—readjustment of the reference and measurement images, and—detection of a change relating to an object in the environment of the robot by comparing the reference and measurement images. A device that implements such a method and a robot equipped with such a device is also provided.

公开(公告)号：US20210080246A1

公开(公告)日：2021-03-18

申请号：US16495769

申请日：2018-03-12

Applicant: FOGALE NANOTECH

Inventor： Alain COURTEVILLE ,  Christian NEEL ,  Charankumar GODAVARTHI

IPC: G01B9/02 ,  G01B11/06 ,  A61B5/00 ,  A61B5/107

Abstract: A low-coherence interferometer apparatus for determining information on interfaces of an object including: a polychromatic light source; an optical system generating a measurement optical beam and a reference optical beam; a delay line introducing a variable optical delay between the optical beams; detection optics combining the beams, and producing a spectral signal representative of an optical-power spectral density of the resulting interference signal; a control and processing module acquiring a plurality of spectral signals for a plurality of optical delays, determining, for each spectral signal, optical retardation information between interfering beams within a spectral measurement range, analyse the variation in the retardations, and assign the optical retardation determined on the basis of the different spectral signals to interface curves, corresponding to straight lines with positive, negative, zero or almost-zero gradient, depending on the respective optical delay of the acquisition of the spectral signals, and to deduce information of the object.

公开(公告)号：US20230332885A1

公开(公告)日：2023-10-19

申请号：US18245605

申请日：2021-09-09

Applicant: FOGALE NANOTECH

Inventor： Sylvain PETITGRAND ,  Alain COURTEVILLE

IPC: G01B11/24

CPC classification number: G01B11/2441

Abstract: A device for measuring interface shape of an optical element, including



at least one low-coherence light source,
at least one optical sensor,
an interferometric device illuminated by the light source or and configured for

shaping at least one measurement beam and at least two reference beams,
directing one measurement beam to the element to pass through the interfaces, and
directing the light from at least two interfaces to the sensor or sensors,
each sensor globally configured for detecting at least two interference signals resulting respectively from interferences between the measurement beam reflected by one of the at least two interfaces and one of the reference beams;
the measurement device also including


a positioner for positioning a coherence area at the level of each interface; and
a digital processor for producing, from the interference signals, an item of information of the shape of each interface according to a field of view.

公开(公告)号：US20220397392A1

公开(公告)日：2022-12-15

申请号：US17754397

申请日：2020-09-21

Applicant: FOGALE NANOTECH

Inventor： Alain COURTEVILLE ,  Gilles FRESQUET

IPC: G01B11/30 ,  G03H1/04 ,  G03H1/00

Abstract: A device and method for measuring a surface of an object, including at least one light source, at least one optical sensor, and an interferometry device having a measurement arm and a reference arm, the former directing light from each light source towards the surface of the object and directing light from the surface towards each optical sensor; the measurement device, in an interferometry configuration, illuminating the reference arm and the measurement arm with each light source and directing the light from the measurement arm and the reference arm towards each optical sensor to form an interference signal; the measurement device, in an imaging configuration illuminating at least the measurement arm and directing the light from the measurement arm towards the optical sensor to form an image of the surface; the measurement device including a digital processor producing, from the interference signal and the image, information on the surface.

公开(公告)号：US20220357236A1

公开(公告)日：2022-11-10

申请号：US17596169

申请日：2019-06-07

Applicant: FOGALE NANOTECH

Inventor： Alain COURTEVILLE ,  Charankumar GODAVARTHI

IPC: G01M11/02 ,  G01B9/0209 ,  G01B9/02 ,  G01B11/24

Abstract: A measurement device, for measuring the shape of an interface to be measured of an optical element having a plurality of interfaces, the device including: measurement apparatus with at least one interferometric sensor illuminated by a low-coherence source, for directing a measurement beam towards the optical element to pass through the plurality of interfaces, and to detect an interference signal resulting from interferences between the measured measurement beam reflected by the interface and a reference beam; positioning apparatus configured for relative positioning of a coherence area of the interferometric sensor at the level of the interface to be measured; digital processor for producing, based on the interference signal, an item of shape information of the interface to be measured according to a field of view. A measurement method, for measuring the shape of an interface of an optical element having a plurality of interfaces is also provided.

公开(公告)号：US20200180162A1

公开(公告)日：2020-06-11

申请号：US16316325

申请日：2018-08-16

Applicant: FOGALE NANOTECH

Inventor： Didier ROZIERE ,  Alain COURTEVILLE

IPC: B25J13/08 ,  B25J19/02 ,  B25J19/06

Abstract: A device for the detection of objects for a robot, provided for equipping said robot, including: at least one sensor, called approach sensor, implementing a first detection technology for detecting a neighbouring object; and at least one sensor, called proximity sensor, implementing a second detection technology for detecting a neighbouring object, different from said the first technology, and having a range less than that of the at least one approach sensor. A robot equipped with such a device is also disclosed.