公开(公告)号：US20210405350A1

公开(公告)日：2021-12-30

申请号：US17468631

申请日：2021-09-07

Applicant: FUJIFILM CORPORATION

Inventor： Takayuki NAONO

IPC: G02B26/08

Abstract: A micromirror device includes first and second actuators, which are piezoelectric actuators each having a piezoelectric element in which a lower electrode, a piezoelectric film, and an upper electrode are laminated on an oscillation plate. In each of the piezoelectric elements, each upper electrode is formed of a plurality of individual electrode parts, each of which is separated by a first stress inversion region and a second stress inversion region, and includes a plurality of piezoelectric parts respectively defined by the plurality of individual electrode parts.

公开(公告)号：US20190214541A1

公开(公告)日：2019-07-11

申请号：US16352770

申请日：2019-03-13

Applicant: FUJIFILM Corporation

Inventor： Takamichi FUJII ,  Takayuki NAONO

IPC: H01L41/083 ,  H01L41/27 ,  H01L41/08 ,  B81C1/00 ,  B06B1/06 ,  H01L41/316 ,  H01L41/047 ,  H01L41/09 ,  H01L41/297

CPC classification number: H01L41/083 ,  B06B1/0611 ,  B81C1/00158 ,  H01L41/0471 ,  H01L41/0478 ,  H01L41/0805 ,  H01L41/0831 ,  H01L41/094 ,  H01L41/0973 ,  H01L41/27 ,  H01L41/297 ,  H01L41/316

Abstract: Provided are a piezoelectric element having high stability, which operates with high efficiency, and a method for manufacturing the piezoelectric element. The piezoelectric element (10) has a laminate structure in which a first electrode (14), a first piezoelectric film (16), a second electrode (18), an adhesion layer (20), an interlayer (22), a third electrode (24), a second piezoelectric film (26), and a fourth electrode (28) are laminated in this order on a silicon substrate (12). The interlayer (22) is formed of a material different from that of the second electrode (18) and has a thickness of 0.4 μm to 10 μm. A device having a diaphragm structure or a cantilever structure is formed by removing a part of the silicon substrate (12). The respective layers (14 to 28) laminated on the silicon substrate (12) can be formed using a thin film formation method represented by a vapor phase epitaxial method.

公开(公告)号：US20170205624A1

公开(公告)日：2017-07-20

申请号：US15473221

申请日：2017-03-29

Applicant: FUJIFILM Corporation

Inventor： Takayuki NAONO

IPC: G02B26/10 ,  H01L41/18 ,  H01L41/09

CPC classification number: G02B26/105 ,  B81B3/0043 ,  B81B2201/042 ,  G02B26/08 ,  G02B26/0858 ,  G02B26/10 ,  H01L41/0933 ,  H01L41/0993 ,  H01L41/18

Abstract: A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. The first actuator part has a first electrode part and second electrode parts. The second actuator part has third electrode parts and a fourth electrode part. The arrangement of the each electrode part constituting an upper electrode corresponds to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, and a piezoelectric portion corresponding to positions of the first electrode part and the third electrode parts and a piezoelectric portion corresponding to positions of the second electrode parts and the fourth electrode part generate stresses in opposite directions.

公开(公告)号：US20150309307A1

公开(公告)日：2015-10-29

申请号：US14330452

申请日：2014-07-14

Applicant: FUJIFILM CORPORATION

Inventor： Takayuki NAONO

IPC: G02B26/08 ,  H01L41/187 ,  B81B7/00 ,  G02B26/10 ,  B81B7/02

CPC classification number: G02B26/0858 ,  B81B3/0043 ,  B81B7/008 ,  B81B7/02 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/04 ,  G02B26/105 ,  H01L41/0933 ,  H01L41/1876

Abstract: In a mirror drive device, a first and second actuator sections are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. Division of an upper and lower electrodes of each of the first and second actuator sections is performed correspondingly to stress distribution of principal stresses in a piezoelectric body in resonant mode vibration, and a piezoelectric body portion corresponding to positions of a first and third upper electrode sections, and a piezoelectric body portion corresponding to positions of a second and fourth upper electrode sections have stresses in opposite directions to each other. Division of the lower electrodes is performed similar to the upper electrodes, and drive voltages having the same phase can be respectively applied to the upper and lower electrode sections of the piezoelectric body portions that are different due to a division arrangement.

Abstract translation: 在反射镜驱动装置中，第一和第二致动器部分布置在支撑镜部分的镜支撑部分的两侧，以夹持反射镜支撑部分。 对应于谐振模式振动中的压电体的主应力的应力分布进行第一致动器部和第二致动器部中的每一个的上下电极的分割，以及对应于第一和第三上电极部的位置的压电体部 并且对应于第二和第四上部电极部分的位置的压电体部分具有彼此相反方向的应力。 下部电极的分割与上部电极类似地进行，并且可以将相同相位的驱动电压分别施加到由于分割布置而不同的压电体部分的上部和下部电极部分。

公开(公告)号：US20130208330A1

公开(公告)日：2013-08-15

申请号：US13763478

申请日：2013-02-08

Applicant: FUJIFILM CORPORATION

Inventor： Takayuki NAONO

IPC: G02B26/10

CPC classification number: G02B26/10 ,  G02B26/0858 ,  H01L41/0953

Abstract: A mirror driving device can include: a mirror part having a reflection surface configured to reflect light; mirror support parts formed at portions of the mirror part diagonal to each other; and a first actuator and a second actuator placed so as to surround the mirror part, wherein the first actuator and the second actuator each have a structure in which a plurality of first piezoelectric cantilevers with a longitudinal direction oriented to a direction of a first axis and a plurality of second piezoelectric cantilevers with a longitudinal direction oriented to a second axis are coupled together so as to be folded, and each of the first actuator and the second actuator has one end connected to the mirror part via a relevant one of the mirror support parts and another end connected to a fixing part near the mirror support part to which the one end is coupled.

Abstract translation: 镜驱动装置可以包括：具有被配置为反射光的反射表面的反射镜部分; 反射镜支撑部分形成在彼此对角的反射镜部分的部分; 以及第一致动器和第二致动器，其被布置成围绕所述镜部分，其中所述第一致动器和所述第二致动器各自具有这样的结构，其中多个第一压电悬臂具有朝向第一轴线的方向的纵向方向， 具有朝向第二轴线的纵向方向的多个第二压电悬臂被联接在一起以被折叠，并且第一致动器和第二致动器中的每一个通过镜支撑件中的相关一个连接到镜部分 部分和另一端连接到靠近镜支撑部分的固定部分，一端连接到该支撑部分。

公开(公告)号：US20230350038A1

公开(公告)日：2023-11-02

申请号：US18300557

申请日：2023-04-14

Applicant: FUJIFILM Corporation

Inventor： Masaaki ABE ,  Takayuki NAONO ,  Yosuke NISHIURA

IPC: G01S7/497 ,  G01S7/481

CPC classification number: G01S7/497 ,  G01S7/4817

Abstract: An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, and an actuator that allows the mirror to swing; a control device configured to control an operation of the actuator; a light irradiation device configured to irradiate a back surface of the mirror on a side opposite to the reflecting surface with illumination light; a detection device to which reflected light of the illumination light that has been reflected by the mirror is incident and configured to output a position signal representing a position of the incidence light; and an abnormality detection device configured to detect an abnormal operation of the mirror based on a temporal fluctuation amount of the position signal.

公开(公告)号：US20230194855A1

公开(公告)日：2023-06-22

申请号：US18171812

申请日：2023-02-21

Applicant: FUJIFILM Corporation

Inventor： Takayuki NAONO ,  Keisuke AOSHIMA

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0858 ,  G02B26/101

Abstract: A micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a movable frame that is connected to the first support portion; a second support portion that swingably supports the mirror portion, the first support portion, and the movable frame around a second axis; a pair of first actuators that are connected to the second support portion and face each other across the second axis; a second actuator that surrounds the first actuator; a first connecting portion that connects the first actuator and the second actuator; a fixed frame that surrounds the second actuator; and a second connecting portion that connects the second actuator and the fixed frame. The second actuator applies rotational torque around the first axis to the mirror portion. The first actuator applies rotational torque around the second axis to the movable frame.

公开(公告)号：US20230139572A1

公开(公告)日：2023-05-04

申请号：US18148521

申请日：2022-12-30

Applicant: FUJIFILM Corporation

Inventor： Yosuke NISHIURA ,  Takayuki NAONO ,  Keisuke AOSHIMA

IPC: G02B26/10 ,  G02B26/08 ,  G01S7/481

Abstract: In a micromirror device, in a case where a resonance frequency around a first axis is denoted by f1 and a resonance frequency around a second axis is denoted by f2, a relationship of f1

公开(公告)号：US20210223539A1

公开(公告)日：2021-07-22

申请号：US17222316

申请日：2021-04-05

Applicant: FUJIFILM Corporation

Inventor： Takayuki NAONO

IPC: G02B26/08 ,  G02B26/10

Abstract: A micromirror device includes: a mirror portion that has a reflective surface reflecting incident light; a first actuator that has an annular shape and is disposed around the mirror portion; a second actuator that has an annular shape and is disposed around the first actuator; a first connection portion that connects the mirror portion and the first actuator on a first axis, which is in a plane including the reflective surface of the mirror portion in a stationary state, and that rotatably supports the mirror portion around the first axis; a second connection portion that connects the first actuator and the second actuator on a second axis, which is in a plane including the reflective surface of the mirror portion in a stationary state and is orthogonal to the first axis, and that rotatably supports the first actuator around the second axis; a third connection portion that is connected to an outer circumference of the second actuator on the second axis; and a fixed portion that is connected to the third connection portion, and supports the second actuator through the third connection portion.

公开(公告)号：US20190222941A1

公开(公告)日：2019-07-18

申请号：US16365119

申请日：2019-03-26

Applicant: FUJIFILM Corporation

Inventor： Yoshikazu HISHINUMA ,  Takayuki NAONO ,  Takahiro SANO

IPC: H04R17/02 ,  H01L41/187 ,  H01L41/113 ,  H01L41/047

Abstract: A piezoelectric microphone includes a plate, a support portion that is provided around the plate, connection portions that connect the plate and the support portion on two or more sides of the plate, and a detection portion including a lower electrode, a piezoelectric film, and an upper electrode which are stacked in this order. The detection portion is stacked on the connection portion . An inflection point of a cross-sectional deformation curve in a case in which the plate and the connection portion are deformed by sound pressure is present in a region in which the detection portion is not stacked.