公开(公告)号：US20230073166A1

公开(公告)日：2023-03-09

申请号：US17901969

申请日：2022-09-02

Applicant: FUJIFILM Corporation

Inventor： Keisuke AOSHIMA

IPC: G02B26/08 ,  G02B26/10

Abstract: The micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a pair of movable frames that face each other across the first axis; a second support portion that swingably supports a movable portion around a second axis; a driving portion that surrounds the movable portion and has a gap with the second support portion on the second axis; a coupling portion that couples the second support portion and the driving portion; and a fixed frame, in which, in a state where the mirror portion rotates around the first axis and an absolute value of a rotation angle is larger than 0 degrees, assuming that, in a plane orthogonal to the first axis and including the second axis, a distance between an intersection between the second axis and a straight line located on a surface of the second support portion and including each end point of the second support portion and an end part of the second support portion on a mirror portion side in a stationary state is denoted by A, and a total length of the second support portion in a direction of the second axis is denoted by L, a relationship of ⅔

公开(公告)号：US20230350193A1

公开(公告)日：2023-11-02

申请号：US18348568

申请日：2023-07-07

Applicant: FUJIFILM Corporation

Inventor： Yosuke Nishiura ,  Takayuki NAONO ,  Keisuke AOSHIMA

IPC: G02B26/10 ,  G02B26/08

CPC classification number: G02B26/101 ,  G02B26/0858

Abstract: An optical scanning device includes: a micromirror device, a first actuator that allows the mirror portion to swing around a first axis, and a second actuator that allows the mirror portion to swing around a second axis orthogonal to the first axis; and a processor that causes the mirror portion to perform precession by providing a first driving signal and a second driving signal each having the same driving frequency to the first actuator and the second actuator, respectively. In the micromirror device, a relationship of f2

公开(公告)号：US20230084499A1

公开(公告)日：2023-03-16

申请号：US18048659

申请日：2022-10-21

Applicant: FUJIFILM Corporation

Inventor： Keisuke AOSHIMA

IPC: G02B26/08 ,  B81B3/00 ,  G02B5/08

Abstract: The micromirror device includes a mirror part, a first actuator that reciprocally rotates the mirror part about the first axis, and a second actuator that reciprocally rotates the mirror part about the second axis. A resonance frequency Ain a lowest-order resonance mode as a resonance mode in which the mirror part and the first actuator are rotated about the first axis in opposite phases to each other, a resonance frequency B in a lowest-order resonance mode as a resonance mode in which the mirror part and the first actuator oscillate in opposite phases in a direction orthogonal to both of the first axis and the second axis, a frequency difference F=A−B, a resonance frequency C less than F and closest to the F, and a resonance frequency D greater than F and closest to F satisfy F−C≥20 Hz and F−D≤−150 Hz.

公开(公告)号：US20230074021A1

公开(公告)日：2023-03-09

申请号：US17901090

申请日：2022-09-01

Applicant: FUJIFILM Corporation

Inventor： Keisuke AOSHIMA

IPC: G02B26/08 ,  G02B26/10

Abstract: The micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a pair of movable frames that face each other across the first axis; a second support portion that swingably supports a movable portion around a second axis; a driving portion that surrounds the movable portion and has a gap with the second support portion on the second axis; a coupling portion that couples the second support portion and the driving portion; and a fixed frame, in which, in a state where the mirror portion rotates around the first axis and an absolute value of a rotation angle is larger than 0 degrees, assuming that, in a plane orthogonal to the first axis and including the second axis, a distance between an intersection between the second axis and a straight line located on a surface of the second support portion and including each end point of the second support portion and an end part of the second support portion on a mirror portion side in a stationary state is denoted by A, and a total length of the second support portion in a direction of the second axis is denoted by L, a relationship of A/L ≤ 2/3 is satisfied.

公开(公告)号：US20230194855A1

公开(公告)日：2023-06-22

申请号：US18171812

申请日：2023-02-21

Applicant: FUJIFILM Corporation

Inventor： Takayuki NAONO ,  Keisuke AOSHIMA

IPC: G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0858 ,  G02B26/101

Abstract: A micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a movable frame that is connected to the first support portion; a second support portion that swingably supports the mirror portion, the first support portion, and the movable frame around a second axis; a pair of first actuators that are connected to the second support portion and face each other across the second axis; a second actuator that surrounds the first actuator; a first connecting portion that connects the first actuator and the second actuator; a fixed frame that surrounds the second actuator; and a second connecting portion that connects the second actuator and the fixed frame. The second actuator applies rotational torque around the first axis to the mirror portion. The first actuator applies rotational torque around the second axis to the movable frame.

公开(公告)号：US20230139572A1

公开(公告)日：2023-05-04

申请号：US18148521

申请日：2022-12-30

Applicant: FUJIFILM Corporation

Inventor： Yosuke NISHIURA ,  Takayuki NAONO ,  Keisuke AOSHIMA

IPC: G02B26/10 ,  G02B26/08 ,  G01S7/481

Abstract: In a micromirror device, in a case where a resonance frequency around a first axis is denoted by f1 and a resonance frequency around a second axis is denoted by f2, a relationship of f1

公开(公告)号：US20220326509A1

公开(公告)日：2022-10-13

申请号：US17717444

申请日：2022-04-11

Applicant: FUJIFILM Corporation

Inventor： Keisuke AOSHIMA ,  Ko OKADA

IPC: G02B26/08 ,  G02B26/10 ,  G02B7/182

Abstract: The micromirror device includes: a movable portion having a mirror portion on which a reflecting surface for reflecting incident light is formed; a first support portion that is connected to the movable portion on a first axis located in a plane including the reflecting surface of the mirror portion in a stationary state, and that swingably supports the movable portion around the first axis; and a pair of first actuators that are connected to the first support portion and face each other across the first axis, each of which being a piezoelectric drive type first actuator that allows the movable portion to swing around the first axis, in which in a case where the movable portion swings around the first axis, at least a part of the first actuator swings around the first axis in a phase opposite to a phase of the movable portion, and assuming that a ratio of a rotation angle of the first actuator to a rotation angle of the movable portion is R, 0

公开(公告)号：US20230324675A1

公开(公告)日：2023-10-12

申请号：US18177900

申请日：2023-03-03

Applicant: FUJIFILM Corporation

Inventor： Keisuke AOSHIMA

IPC: G02B26/10 ,  G02B26/08

CPC classification number: G02B26/0858 ,  G02B26/101

Abstract: The micromirror device includes: a pair of connecting portions that have a thinner thickness than a fixed frame; and four piezoelectric sensors in each of which a shape and a position of an upper electrode are in a line-symmetrical relationship about a first axis and a second axis. In a case where a stretching direction of the connecting portion is a first direction, a direction orthogonal to the first direction and located in a plane is a second direction, and a length of a boundary between the fixed frame and the connecting portion in the second direction is denoted by H, at least a part of each of the four piezoelectric sensors is within a range of H/2 in the second direction from an axis parallel to the first direction, out of the first axis and the second axis, and is disposed on the fixed frame.

公开(公告)号：US20230305116A1

公开(公告)日：2023-09-28

申请号：US18180444

申请日：2023-03-08

Applicant: FUJIFILM Corporation

Inventor： Takayuki NAONO ,  Keisuke AOSHIMA

IPC: G01S7/481 ,  G01S7/4915 ,  G01S7/4865

CPC classification number: G01S7/4817 ,  G01S7/4915 ,  G01S7/4865

Abstract: A driving controller applies a first driving signal Vx(t) including two components of different frequencies f1 and f2 represented by the following equation (A) to a first actuator and a second driving signal Vy(t) including components of the frequencies f1 and f2 represented by the following equation (B) to a second actuator.


VX(t)=Ax1sin(2πf1t)+Ax2sin(2πf2t+γ3). . .   (A)



Vy(t)=Ay1sin(2πf1t+γ1)+Ay2sin(2πf2t+γ3+γ22). . .   (B)

公开(公告)号：US20230185081A1

公开(公告)日：2023-06-15

申请号：US18163611

申请日：2023-02-02

Applicant: FUJIFILM Corporation

Inventor： Keisuke AOSHIMA

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00

CPC classification number: G02B26/0858 ,  B81B3/0045 ,  G02B26/101 ,  B81B2201/042 ,  B81B2203/0154

Abstract: A micromirror device includes a first support portion that is connected to the mirror portion on a first axis located in a plane including the reflecting surface of the mirror portion in a stationary state, and that swingably supports the mirror portion around the first axis. The first support portion is composed of a main shaft stretched along the first axis and a plurality of sub-shafts symmetrically disposed on both sides of the main shaft across the first axis and stretched along the first axis, the first support portion has a folded structure having three or more folded portions formed by connecting the plurality of sub-shafts, and in a case where inner curvature radii of the folded portions are denoted by R1, R2, R3, ... , in order from the closest to the first axis, a relationship of 0.73 ≤ Rk+1/Rk ≤ 0.9 (k = 1, 2, ...) is satisfied.