公开(公告)号：US20220326509A1

公开(公告)日：2022-10-13

申请号：US17717444

申请日：2022-04-11

Applicant: FUJIFILM Corporation

Inventor： Keisuke AOSHIMA ,  Ko OKADA

IPC: G02B26/08 ,  G02B26/10 ,  G02B7/182

Abstract: The micromirror device includes: a movable portion having a mirror portion on which a reflecting surface for reflecting incident light is formed; a first support portion that is connected to the movable portion on a first axis located in a plane including the reflecting surface of the mirror portion in a stationary state, and that swingably supports the movable portion around the first axis; and a pair of first actuators that are connected to the first support portion and face each other across the first axis, each of which being a piezoelectric drive type first actuator that allows the movable portion to swing around the first axis, in which in a case where the movable portion swings around the first axis, at least a part of the first actuator swings around the first axis in a phase opposite to a phase of the movable portion, and assuming that a ratio of a rotation angle of the first actuator to a rotation angle of the movable portion is R, 0