公开(公告)号：US11322372B2

公开(公告)日：2022-05-03

申请号：US16635002

申请日：2018-07-31

Applicant: FUJIKIN INCORPORATED

Inventor： Toshihide Yoshida ,  Yukio Minami ,  Tsutomu Shinohara

IPC: B01J4/00 ,  H01L21/67

Abstract: A fluid supply device includes a condenser, a tank that stores the fluid, a pump that pressure-feeds the fluid toward a processing chamber, a main pipe connecting the tank and the pump and transferring the liquid stored in the tank to the pump using a weight of the liquid, and a discharging pipe that is connected to the main pipe at a lowest position of the main pipe at one end, is opened to the atmosphere at the other end, and vaporizes and discharges the liquid in the tank and the main pipe to the outside. The discharging pipe is formed so that, after the liquid in the tank and the main pipe is fully discharged, a liquid pool that separates a space on the atmosphere side and a space on the main pipe side of the discharging pipe is temporarily produced in the discharging pipe.

公开(公告)号：US20230392741A1

公开(公告)日：2023-12-07

申请号：US18033900

申请日：2021-08-16

Applicant: FUJIKIN INCORPORATED

Inventor： Ichiro Tokuda ,  Tsuyoshi Tanikawa ,  Yukio Minami

IPC: F16L55/11 ,  F16K27/00

CPC classification number: F16L55/11 ,  F16K27/003

Abstract: Provided is a closing plug capable of easily closing an open end of a flow passage without concern of scale. The closing plug includes: a gasket configured to come into contact with an annular projection formed in a step portion inside the open end of the flow passage of a flow passage block; a columnar pressing member formed by cutting out an inner side of a pressing surface so as to press a peripheral edge portion of the gasket; and a closing plug screw configured to be screwed into a female screw formed in an inner peripheral surface on an open end side from the step portion and press the pressing member toward the gasket by movement caused by screwing.

公开(公告)号：US11569101B2

公开(公告)日：2023-01-31

申请号：US16634681

申请日：2018-07-31

Applicant: FUJIKIN INCORPORATED ,  TOKYO ELECTRON LTD.

Inventor： Toshihide Yoshida ,  Yukio Minami ,  Tsutomu Shinohara

IPC: H01L21/67 ,  H01L21/02

Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies a fluid in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied fluid stored in the tank toward the processing chamber, and a heating means provided to a flow path communicating with a discharge side of the pump and for partially changing the liquid in the flow path to a supercritical fluid.