公开(公告)号：US3872349A

公开(公告)日：1975-03-18

申请号：US39065973

申请日：1973-08-22

Applicant: FUSION SYSTEMS CORP

Inventor： SPERO DONALD M ,  EASTLUND BERNARD J ,  URY MICHAEL G

IPC: H01J65/04 ,  H01J7/46 ,  H01J19/80

CPC classification number: H01J65/044 ,  Y10S422/906

Abstract: An improved structure for a microwave generated plasma light source for emitting radiation in the ultraviolet and visible portions of the spectrum. Microwave energy generated by a microwave source is coupled to a plasma forming medium which is confined in a longitudinally extending tube. The tube is surrounded along its length by a microwave chamber, a portion of which comprises a means for reflecting the emitted radiation and a portion of which comprises a mesh-like member which is substantially transparent to the emitted radiation, but which is relatively opaque to the microwave energy. The microwave energy may be fed to the microwave chamber either from the end thereof, or from the top or sides if the microwave sources is housed in a waveguide located on the top or sides of the chamber. The plasma forming medium is confined at a relatively high pressure and the microwave energy is coupled thereto at a high enough power density to create electron densities in the plasma in excess of the cutoff density. Electrons are excited by the transformation of waves and wave absorption and collide with the heavy particles of the plasma which emit ultraviolet and visible radiation upon de-excitation.

Abstract translation: 用于微波产生等离子体光源的改进的结构，用于在紫外线和可见光谱部分发射辐射。 由微波源产生的微波能量耦合到限制在纵向延伸的管中的等离子体形成介质。 该管沿其长度被微波室围绕，其一部分包括用于反射所发射的辐射的装置，其一部分包括对所发射的辐射基本上透明的网状构件，但是对于 微波能量。 如果微波源被容纳在位于室的顶部或侧面上的波导中，微波能量可以从其端部或从顶部或侧面馈送到微波室。 等离子体形成介质被限制在相对高的压力下，并且微波能量以足够高的功率密度耦合到其上，以在等离子体中产生超过截止密度的电子密度。 电子被波浪和波吸收的转变激发，并与去激发时发射紫外线和可见光的等离子体的重粒子碰撞。

公开(公告)号：US3911318A

公开(公告)日：1975-10-07

申请号：US43917374

申请日：1974-02-04

Applicant: FUSION SYSTEMS CORP

Inventor： SPERO DONALD M ,  EASTLUND BERNARD J ,  URV MICHAEL G

IPC: B01J19/12 ,  H01J65/04 ,  H05H1/46 ,  H01J7/46 ,  H01J19/80

CPC classification number: H05H1/46 ,  B01J19/122 ,  B01J19/124 ,  B01J19/126 ,  B01J19/129 ,  B01J2219/0894 ,  B01J2219/1227 ,  H01J65/044 ,  H01J65/046 ,  Y10S422/906

Abstract: There is disclosed a novel method and apparatus for generating high power electromagnetic radiation in the ultraviolet and visible regions of the electromagnetic spectrum wherein high energy electrons, produced by directing a lower frequency (radio to microwave) electromagnetic energy wave into a plasma producing medium (gas, vapor and mixtures thereof), are caused to collide with heavy particles of the medium to thereby cause same to be collisionally excited and subsequently emit electromagnetic radiation. Particular means are disclosed for coupling the lower frequency electromagnetic wave energy to the medium. In a preferred embodiment the medium is confined in a closed vessel or chamber at a selected pressure to which a magnetic field is applied to guide the high energy electrons to collision with said heavy particles.

Abstract translation: 公开了一种用于在电磁光谱的紫外和可见区域中产生高功率电磁辐射的新型方法和装置，其中通过将较低频率（无线电至微波）电磁能量波引导到等离子体产生介质（气体 ，蒸汽及其混合物）与介质的重颗粒碰撞，从而使其相互碰撞激励，随后发射电磁辐射。 公开了用于将低频电磁波能量耦合到介质的特定装置。 在优选的实施方案中，介质被限制在密封容器或室中，所述压力或室在所选择的压力下施加磁场以引导高能电子与所述重颗粒碰撞。