APPARATUS AND METHOD OF INCREASING PRECISION CONTROL OF CHARGE DEPOSITION ONTO A SEMICONDUCTOR WAFER SUBSTRATE

    公开(公告)号:US20240094278A1

    公开(公告)日:2024-03-21

    申请号:US18350250

    申请日:2023-07-11

    CPC classification number: G01R31/265 G01R31/2601

    Abstract: The present invention relates to corona charge deposition systems that use High Voltage (HV) amplifiers for precisely controlling corona charge deposition. Some implementations, provide a corona charge deposition system that uses multiple voltage sources to maintain specified voltages applied on several electrodes to precisely control the corona current required to deposit a desired amount of charge on a sample. The HV amplifiers are able to source and sink currents to maintain stable voltages applied on control electrodes in the presence of a higher voltage applied on a needle electrode. The proposed apparatus and method of monitoring multiple signals, controlling multiple voltages, and predicting charge profile deposited on a sample can precisely control charge deposition processes.

    METHOD AND APPARATUS FOR MAIN DETECTOR SYNCHRONIZATION OF OPTICALLY BASED SECOND HARMONIC GENERATION MEASUREMENTS

    公开(公告)号:US20240085324A1

    公开(公告)日:2024-03-14

    申请号:US18462073

    申请日:2023-09-06

    CPC classification number: G01N21/636 G01N2021/637 G01N2201/067

    Abstract: Methods are disclosed for improving one or more of jitter/timing, signal-to-noise ratio, signal integrity, stability, and repeatability of generation and measurement of Second Harmonic Generation (SHG) signals generated by a sample upon illumination by a light beam. The method may use precision hardware to control the generation of SHG signal and synchronize it with the optical detection process to improve the reliability and accuracy of measured SHG signals. A precise measurement of the initial SHG signal (Io) involves accurate temporal alignment between optical excitation and detection of the resulting SHG signal. Various disclosed systems and methods use high-speed Pockels Cell (PC) for controlling incident light, and precision electronics for synchronization.

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