公开(公告)号：US09998089B2

公开(公告)日：2018-06-12

申请号：US14650658

申请日：2013-12-13

Applicant: GENERAL ELECTRIC COMPANY

Inventor： Russell Craddock ,  Roger Jones ,  Li Zhao ,  Muhammad Irshad

IPC: G01L1/10 ,  H03H9/02 ,  G01L9/00 ,  G01L19/00 ,  G01L19/04 ,  G01K7/32 ,  G01P15/02 ,  H03H3/007 ,  H03H3/02

CPC classification number: H03H9/02244 ,  G01K7/32 ,  G01L1/103 ,  G01L9/002 ,  G01L9/0077 ,  G01L19/0092 ,  G01L19/04 ,  G01P15/02 ,  H03H3/0072 ,  H03H3/02

Abstract: A resonator device 10 is disclosed. The resonator device may be used in a transducer or a sensor such as a pressure, force or acceleration sensor. The resonator device comprises a resonator 20 provided on a diaphragm 30. A cap 40 is provided which may be fusion bonded to the diaphragm 30 to enclose the resonator 20 and form a hermetically sealed package 10. The resonator device is excited by applying electromagnetic stimulation, such as infra-red or optical stimulation, which may be from a laser via a fiber 50. The resonator device may be interrogated by applying an electromagnetic signal into the optical cavity formed between the resonator 20 and the inside surface of the cap 40 to derive a frequency change of the resonator. As the resonator device incorporates a hermetically sealed package and is stimulated by electromagnetic radiation, it is robust and able to operate in harsh environments.